Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Parallel Seal Type Slit Valve, HIGH VACUUM VALVE, L41, 14 lb

Parallel Seal Type Slit Valve, HIGH VACUUM VALVE, L41, 14 lb

Parallel Seal Type Slit Valve, HIGH VACUUM VALVE, L41, 14 lb

Air Slide Table Series MXQ

) 8 8 8 Lr = 70mm MXQ8-75 MXQ8-10 MXQ8-20 0.03 MXQ8-30 MXQ8-30 MXQ8-30 0.06 MXQ8-75 MXQ8-50 MXQ8-40 MXQ8-20 MXQ8-30 MXQ8-40 MXQ8-75 Table displacement mm Table displacement mm Table displacement mm 0.010 0.02 0.04 MXQ8-40 MXQ8-30 MXQ8-20 MXQ8-10 MXQ8-50 0.005 MXQ8-50 0.01 0.02 MXQ8-10 0 40 80 120 0 0 20 40 60 20 40 60 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N

MXS Series Air Slide Table

MXS2020 0.015 MXS2050 MXS2040 MXS2010 0.010 MXS2030 MXS2020 MXS2010 0.01 0.02 0.005 100 200 300 0 0 0 100 200 300 160 120 80 40 240 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 25 25 25 Lr=154mm 0.040 0.07 0.05 MXS25-125 MXS25-150 MXS25-100 0.035 MXS25-150 MXS25-75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 0.06 MXS25-125 MXS25-100 MXS25-125 MXS25-150 MXS25-

AIR COMBINATION

Example AC10-M5CG-T-12NR-A AC 10 M5 1N A 1N 1 2 3 Symbol Description Nil Without auto drain a Float type auto drain N.C. (Normally closed) Drain port is closed when pressure is not applied.

NCQ2/CQ2

495 589 841 935 1360 1510 2140 2360 3376 3682 4313 4618 5655 6032 7257 7634 9048 9425 0.7 59 79 106 141 165 220 264 344 422 563 739 880 1150 1370 1960 2180 3170 3520 5000 5500 7878 8590 10063 10776 13195 14074 16933 17813 21112 21991 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 1N

AIR COMBINATION

Example AC30-03DM-KSTV-13NR-A AC 30 03 DG 1N A F 1N 1 3 4 5 6 2 1 Symbol Description Body size 10 20 25 30 40 Nil Metric thread (M5) c Pipe thread type 2 Note 1) Note 2) Port size 3 Nil Without auto drain a Float type auto drain N.C. (Normally closed) Drain port is closed when pressure is not applied. Note 4) Note 3) N.O.

Modular F.R.L. Unit

/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 3/4 Bracket Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 Pages 36 through 40 AR60 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8 AR40K 1/4, 3/8, 1/2 AR40K-06 3/4 AR50K 3/4, 1 Pages 43 through 48 AR60K 1 35 Regulator AR10 to 60 How to Order AR 30 1N

Best Pneumatics Vol. 14

AR 30 K F 03 1N BE Regulator Option Body size Symbol 1 (2) Description 0.02 to 0.2 MPa setting Non-relieving Applicable model AR20K to 60K 20 25 30 40 50 60 N R Y AR20K to 60K With back flow mechanism AR20K to 60K Flow direction: Right Left Upward handle Name plate and pressure gauge in imperial units (PSI, F) Note) AR10 comes with a back flow mechanism as a standard feature.

Table of Contents

AR 30 K F 03 1N BE Regulator Option Body size Symbol 1 (2) Description 0.02 to 0.2 MPa setting Non-relieving Applicable model AR20K to 60K 20 25 30 40 50 60 N R Y AR20K to 60K With back flow mechanism AR20K to 60K Flow direction: Right Left Upward handle Name plate and pressure gauge in imperial units (PSI, F) Note) AR10 comes with a back flow mechanism as a standard feature.

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

2

Example) AW30-03BG-1N-A Made to Order (Refer to pages 207 to 210 for details.)