Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector), End Lock: N (None)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: None, End Lock: N (None)

Table of Contents

Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Alarm No.: 1F Name: Encoder initial communication error 3 Alarm content The connected encoder is not compatible with the driver. Display Detail name Cause Check method Check result Action Target 1F.1 Incompatible encoder (1) A servo motor or linear Check the model the servo motor/linear encoder. It is not compatible with the driver. Replace it with a compatible one.

LEC-OM07605CN

PA01] LECSS2T Pa01] 1E 2 1E.1 (1) LECSS2T (2) (2) 1E.2 (1) LECSS2T (2) (2) 8 16 8. 1F 3 1F.1 (1) LECSS2T (2) (2) (3) (3) 1F.2 (1) LECSS2T (2) (2) (3) (3) 8 17 8. 20 1 20.1 (1) ABZ LECSS2T (2) 1 (2) (3) (3) (4) (4) 20.2 [AL. 20.1] 2 20.3 3 20.5 (1) ABZ B (PA,PAR,PB,PBR) LECSS21 T (2) (2) [AL. 20.1] LECSS2T (3) (4) (5) 20.6 (1) ABZ Z (PZ,PZR) LECSS22 T (2)

2

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 2 S G 1F M5 1 0 06 AS Body size 1 S Body size 2/3/4 2 2 0 S G 01 06 AS 1F With indicator Body size 2 1/8, 1/4 3 3/8 4 1/2 Made to Order Refer to page 512 for details. Type Seal method 2 Elbow Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Alarm No.: 1F Name: Encoder initial communication error 3 Alarm content The connected encoder is not compatible with the driver. Detail No. Detail name Cause Check method Check result Action 1F.1 Incompatible (1) A servo motor encoder, Check the model of the servo motor encoder. It is not compatible with the driver.