Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Table of Contents Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow
Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow
Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow
Alarm No.: 1F Name: Encoder initial communication error 3 Alarm content The connected encoder is not compatible with the driver. Display Detail name Cause Check method Check result Action Target 1F.1 Incompatible encoder (1) A servo motor or linear Check the model the servo motor/linear encoder. It is not compatible with the driver. Replace it with a compatible one.
PA01] LECSS2T Pa01] 1E 2 1E.1 (1) LECSS2T (2) (2) 1E.2 (1) LECSS2T (2) (2) 8 16 8. 1F 3 1F.1 (1) LECSS2T (2) (2) (3) (3) 1F.2 (1) LECSS2T (2) (2) (3) (3) 8 17 8. 20 1 20.1 (1) ABZ LECSS2T (2) 1 (2) (3) (3) (4) (4) 20.2 [AL. 20.1] 2 20.3 3 20.5 (1) ABZ B (PA,PAR,PB,PBR) LECSS21 T (2) (2) [AL. 20.1] LECSS2T (3) (4) (5) 20.6 (1) ABZ Z (PZ,PZR) LECSS22 T (2)
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 2 S G 1F M5 1 0 06 AS Body size 1 S Body size 2/3/4 2 2 0 S G 01 06 AS 1F With indicator Body size 2 1/8, 1/4 3 3/8 4 1/2 Made to Order Refer to page 512 for details. Type Seal method 2 Elbow Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.
Alarm No.: 1F Name: Encoder initial communication error 3 Alarm content The connected encoder is not compatible with the driver. Detail No. Detail name Cause Check method Check result Action 1F.1 Incompatible (1) A servo motor encoder, Check the model of the servo motor encoder. It is not compatible with the driver.
Made to Order (Refer to page 422 for details.) 416 Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Made to Order (Refer to page 422 for details.)
Alarm No.: 1F Name: Encoder initial communication error 3 Alarm content The connected encoder is not compatible with the driver. Detail No. Detail name Cause Check method Check result Action 1F.1 Incompatible (1) A servo motor encoder, Check the model of the servo motor encoder. It is not compatible with the driver.
Take the appropriate measures according to the cause. environment Alarm No.: A.1F Name: Encoder initial communication error 3 Description Incompatible encoder is connected. Detailed Detailed Name Cause Checking method Result Action display 1F.1 Incompatible encoder 1) Incompatible servo motor Check the model of servo motor. Servo motor is incompatible. Replace the servo motor.
Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General
Programmable controller PLC Master station Input module Power supply CPU QJ61BT11N QX40 Q62P Q02HCPU (X/Y00 to 1F) (X20 to X2F) X20 to X28 Terminating resistor Station No.1 Servo amplifier Driver (2 stations occupied) Terminating resistor Input signal assignment Input signal Signal name General operation when the input is on X20 Reset command Resets the driver on an occurrence of a servo
Programmable controller PLC Master station Input module Power supply CPU QJ61BT11N QX40 Q62P Q02HCPU (X/Y00 to 1F) (X20 to X2F) X20 to X28 Terminating resistor Station No.1 Driver Servo amplifier (2 stations occupied) Terminating resistor Input signal assignment Input signal Signal name General operation when the input is on X20 Reset command Resets the driver on an occurrence of a servo