Nominal Size: 63mm, Stroke: 100mm, Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 2 (200VAC), Electrical Entry: C (Conduit)
Nominal Size: 63mm, Stroke: 300mm, Size: S (Small Flow Style), Control Valve: 2 (Metering Valve), Combination Valve: 2 (Stop Valve), Voltage: 2 (200VAC), Electrical Entry: C (Conduit)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Solenoid: No.2 Solenoid, Body Option: 7 (32A), Style: 2 (Energized Closed/N.O.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 32 (Flange 32A), Thread: Rc, Voltage: 2 (200VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.1 Solenoid, Body Size: 5 (20A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 04 [1/2 (20A)], Thread: Rc, Voltage: 2 (200VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: -, Size: -, Style: -, Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Electrical Entry: -, Surge Suppressor: -, Built-in Full-wave Rectifier: -, 1: -, Bracket: -
Solenoid: -, Size: -, Style: -, Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Electrical Entry: -, Surge Suppressor: -, Built-in Full-wave Rectifier: -, 1: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Model: -, Orifice Size: -, Style: -, Fluid Option: -, Suffix: -, Port Size: -, Thread: -, Voltage: -, Lead Wire: -, Surge Suppressor: -, Rectifier: -, Bracket: -
Solenoid: No.2 Solenoid, Body Option: 32A, Style: Energized Closed/N.O., Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: Flange 32A, Thread: Rc, Voltage: 200VAC 50/60HZ, Lead Wire: Conduit, Surge Suppressor: -, Bracket: -