New

14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water

Vacuum Unit

(O.D.: Within 6.2) 10 Ejector System Vacuum Unit ZK2mA Series For Manifold Ejector + With Valve + Without Energy Saving Function Refer to page 14 for How to Order Manifold.

Lubricator

Piping port thread ty pe Rc Rc C2SL-6-A C2SL-6C-A G G NPT C2SL-6(Z)-A NPT C2SL-6C(Z)-A Semi-standard symbol 3 36 3C 36C Semi-standard: 3 Semi-standard: 3C (7) Part No. Piping port thread ty pe Piping port thread ty pe (7) Part No. Rc Rc C2SL-3-D C2SL-3C-D G G NPT C2SL-3(Z)-D NPT C2SL-3C(Z)-D Appearance and part No.

PSE200

SET button decreases the value. 2 Copy setting Refer to B Copy setting function on page 14 for details.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

SET button decreases the value. 2 Copy setting Refer to B Copy setting function on page 14 for details.

modular-press-e

For mounting, please use the included mounting screws (M3 x 0.5 x 14).

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Modular F.R.L. Pressure Control Equipment

For mounting, please use the included mounting screws (M3 x 0.5 x 14).

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Table of Contents

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

AC Servo Motor Driver (Network card type ）

If the voltage drop (maximum of 5.2 V) interferes with the relay operation, apply high voltage (maximum of 26.4 V) from external source. 13 13 14. APPLICATION OF FUNCTIONS 14. APPLICATION OF FUNCTIONS .2 14.1 Infinite feed function (setting degree) .2 14 1 14. APPLICATION OF FUNCTIONS 14.

AC Servo Motor Driver

For LECSB-S5 LECSB-S7 LECSB-S8 14 5 14.

AC Servo Motor Driver (CC-Link Type ）

14 29 14.

AC Servo Motor Driver (CC-Link Type ）

14 14.

Table of Contents

0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Proposals for Energy Saving

L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 14 14 14 14 14 14 14 KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 D 2 H1 A L1 Connection

Modular Design with Uniform Body Style

(The SI unit type is provided for use in Japan.) *12 Excludes port size 06 *13 v: For the pipe thread type: NPT only *14 A special body type is required to mount the element service indicator.

Compact Manifold Regulator Series ARM5

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the handle is unlocked.

smcmaintenancepartslist

Plate mount bolt tightening torque (kgfcm) Width across flat (mm) 5 Bore size (mm) Retaining ring size 12 RTW-13 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 q w 32 RTW-34 14 220 40 RTW-42 14 220 Not to hurt 50 RTW-52 17 440 63 RTW-65 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 Removal of End Lock (With End Lock) 1.