F/ISE

/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R 1/ 4NPT 1/4G

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(M5) Type 41 NVVsZ3-41-(05 )1-M5 =r _T Stationsa aslze ot A, B port TtlZ statro^Ms-lto-3, fiomlMst i l : 20 I 20 stations TypE 42 Nvv5z3-42-60rrfrD -.T:tI g"tion"l lfiire ot a, B po* ofr | % NPTF _ B7T | one touch fitting lor /4" tube Type 43 NVV5Z3-4g-6S1-esr --l_T Ststionsa .Slze ot A, B port otTtstatrc.s -T, 20 | 20 stations 83il ffi hrclr fittl.g l"V t b" NVZ3000 Proper Combinatiott"s

2-Color Display

Option Note ZS-38-A1 ZS-38-A2 ZS-38-A3 ZS-27-C ZS-27-D ZS-27-01 ZS-38-3L ZS-38-4L ZS-38-3G ZS-38-4G ZS-38-5L ZS-38-U ZS-38-C4H ZS-38-C6H ZS-38-N7H ZS-38-C4L ZS-38-C6L ZS-38-N7L Bracket A Bracket B Bracket C Panel mount adapter Lead wire with connector (with connector cover) Lead wire with a connector for copying Lead wire unit with a connector for copying One-touch fittings 4 mm straight

Clean Exhaust Filter SFE Series

Max. ow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch tting type Specications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum ow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating Note

Size/Port: 4G [One-touch Fitting Type, Applicable Tube OD: ø6, Flow: 65 L/min (ANR)]

Model: S (Hexagon Socket Head Male Connector), Tube Size: 08 (Ø8), Connection Thread: G02 (1/4G)

Model: L (Male Elbow), Tube Size: 08 (Ø8), Connection Thread: G02 (1/4G)

Model: T (Male Branch Tee), Tube Size: 10 (Ø10), Connection Thread: G02 (1/4G)

Model: T (Male Branch Tee), Tube Size: 06 (Ø6), Connection Thread: G02 (1/4G)

Model: S (Hexagon Socket Head Male Connector), Tube Size: 10 (Ø10), Connection Thread: G02 (1/4G)

Model: W ( Extended Male Elbow), Tube Size: 10 (Ø10), Connection Thread: G02 (1/4G)

Model: S (Hexagon Socket Head Male Connector), Tube Size: 06 (Ø6), Connection Thread: G02 (1/4G)

1/2andquot;ASP430F-F02R 1/4G 1/8----------------

1/2andquot;ASP430F-F02R 1/4G 1/8----------------

Adjustable height stopper cylinder, Double acting and single acting available, Bore sizes: 40mm, 50mm, Stroke range: 20mm to 30mm, Auto switch capable, CYL, STOPPER, ACTUATOR, 63MM RSH OTHERS (COMBO), 7.08400 lb, ModelP (Piping port) NilTNTFRS1H63Rc 1/4NPT 1/4G 1/4

Please contact us for the latest version.sales@ocaire.com, ModelP (Piping port) NilTNTFRS1H80Rc 1/4NPT 1/4G 1/4

Please contact us for the latest version.sales@ocaire.com, ModelP (Piping port) NilTNTFRS1H80Rc 1/4NPT 1/4G 1/4

1/2andquot;ASP430F-F02R 1/4G 1/8----------------

.: 06 (Ø6), Connection Thread: G02 (1/4G)

.: 08 (Ø8), Connection Thread: G02 (1/4G)