VM

Push Button (Mushroom)/VM120-01-30R, B, G, Y/VM130-01-30R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T. Push Button (Extended)/VM120-01-32R, B, G, Y/VM130-01-32R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

VM

T.T. 60 Push button (Mushroom) VM220-02-30R/B/G/Y VM230-02-30R/B/G/Y JIS Symbol 2 port Panel mounting hole 3 port EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T. 5-6-23 Series VM200 Series VM200 Push button (Extended) VM220-02-32R/B/G/Y VM230-02-32R/B/G/Y JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa

VFR5000 Series

B side 3 COM Ground Terminal block Model A(1) B+(3) B(4) marking VFR510 A side COM VFR520 A side COM B side 3 VFR540 5 A side COM B side Terminal block assembly can be used as + and common regardless of markings. Do not remove jumper bar because it is used for common connection.

VFR3000 Series

B side 3 COM Ground A B B + B side solenoid Common (COM) terminal A side solenoid DC AC Surge voltage suppressor (1) Red (+) (3) A side terminal block B side terminal block (2) Varistor Black (-) A side B side 8 VFR3000-OMH0003-B VFR3000 Series 5 Port Solenoid Valve / Specific Product 2 Be sure to read before handling.

Compact Vacuum Unit

Note 2) M-type plug connector is not available with the model with pressure sensor. 13A Table 3 Supply valve/release valve accessories Manual override Note 3) Supply valve/release valve model Accessories ZB1-VQ110UZB1-VQ110U-B ZB1-VQ110LZB1-VQ120UZB1-VQ120U-B ZB1-VQ110ZB1-VQ110-B Nil B Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs.

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Series VQ100

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

VFR5000-OMN0001

() A-(1) B+(3) B-(4) A B VFR510 A COM A B VFR520 A COM B 3 A COM B VFR5 40 5 8 VFR5000-OMN0001 VFR5000 Series/ (VFR500) (VFR510) VFR500 VFR510 () () 2.8Nm ) AC DC24V 3 (AB) (N.C.)

VFR3000-OMJ0001

B-+COM-COM 1.25-31.25-3S1.25Y-3N1.25Y-3S G DC ++(-) DIN 2 1 SOLA 1 A B B + SOLB 2 3 COM B (COM) A DC AC A B + + + + A B 70 8 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 2 2 2 2 3 3 3 3 (A,B) ( ( ( (VFR3 VFR3 VFR3 VFR3 00 00 00 00) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 10 10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3

VQ

Latching style Latching style AC () () (+) 100V AC, 200V AC 100V AC, 200V AC Reset B C Set Yellow Yellow Blue Red A A Single solenoid (AC) Latching solenoid (AC) COM. Blue Red Blue Red SOL. C C A set A SOL. Reset Gray Gray Single style B C COM SOL. SOL.

ZB-OM00301

JIS B 8370: JIS B 8361: JIS B 9960-1: -((1 :) JIS B 8433-1993: *2) : : : 1 2. 3. 1. 2. 3. 4. 2 2 - No.ZB-OM00301 3 1 1 *3) 1 1 () () () 3 - No.ZB-OM00301 () () 4 - No.ZB-OM00301 () * JIS B 8392-1 2.4.32.6.3 () 5 - No.ZB-OM00301 * F.G.

VFR2000-OMM0001

B VFR2 1.25-31.25-3S1.25Y-3N1.25Y-3S VFR2000 A-B+B+COM -COM 1)8 2)+COM -COM 3)D U D 1 -12No.VFR2000-OMM0001 01F D COM A B 1)8 2)+COM -COM 3)D U D 1 -13No.VFR2000-OMM0001 () X () (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

VFR4000-OMH0003

Although A, B+ and B marks are indicated on the terminal block, this can be used as either +COM or COM.

20

Nozzle length (D) 123 332 632 A B C Body color White Dark blue W BU Connection size Piping connection type Piping connection method Size and model no.

VFR2000 Series

Lead wire connection 01F Type D-sub Connector Wire connection specification Lead wire at both of solenoid A and B sides in manifold is connected to connector terminal as COM specification. Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and -COM.

20

In periodical inspections, check the following items and replace the parts if necessary. a) Scratches, gouges, abrasion, corrosion b) Air leakage c) Twisting, crushing and turning of connected tubes d) Hardening, deterioration and softening of connected tubes e) Loosening of nozzles 2.

Electro-Pneumatic Proportional Valve

0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B

Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 10 Stations, A, B Port: 01F (G1/8)

Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 12 Stations, A, B Port: 01F (G1/8)