V100

S Z Nil 14 1 2 1 20 2 Indicator light is not available for grommet type.

4/5 Port Solenoid Valve

Not required Mounting orientation Unrestricted Shock/Vibration resistance m/s 2 Note 2) 150/30 Dustproof ( M8 connector conforms to IP65.)

SX

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Swivels

Port 1 Port 2 B Port 2 Port 1 PS2410303-20-20 5.31" 3.78" 2.63" 2.88" 1 5/8-12 1 5/8-12 134.8 mm 95.9 mm 66.7 mm 73.0 mm UN-2A UN-2A PS2410303-24-24 5.31" 3.78" 2.63" 2.88" 1 7/8-12 1 7/8-12 134.8 mm 95.9 mm 66.7 mm 73.0 mm UN-2A UN-2A Dia PS3210303-32-32 6.20" 4.28" 3.06" 3.35" 2 1/2-12 2 1/2-12 157.5 mm 108.6 mm 77.6 mm 85.1 mm UN-2A UN-2A Wrench Flats Male 37 Flare Female 37 Flare A Part

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

2

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 2 S G 1F M5 1 0 06 AS Body size 1 S Body size 2/3/4 2 2 0 S G 01 06 AS 1F With indicator Body size 2 1/8, 1/4 3 3/8 4 1/2 Made to Order Refer to page 512 for details. Type Seal method 2 Elbow Nil Without sealant S With sealant Control type Note) Note) Face seal type is used for the G thread type.

0.55

N.C. 3.2 4 6 8 10 12 16 1P, 2A, 3R 1/8, 1/4 VP(A)300 X M5 1P, 2A, 3R 1/4, 3/8 VP(A)500 X 1/8 N.O. 1P, 2A, 3R 3/8, 1/2 VP(A)700 1. Remove the body from the sub-plate and reset the H mark on the body corresponding to the N.O. mark on the sub-plate as shown in the figure above. 2.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

After 0.8 s After 0.8 s Status Alarm No. Blank After 0.2 s Status Axis No. (2 digits) Alarm No. Alarm detail (1 digit) (2 digits) (1 digit) "n": Indicates that an alarm is occurring. 4 11 4.

Table of Contents

2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

LEC-OM07605CN

PL17] 27.2 (1) ON (2) (2) ( ) [Pr. PL09] 27.3 (1) OFF ON OFF 27.4 [AL. 27.1] 27.5 27.6 27.7 8 22 8. 28 2 28.1 (1) LECSS2-T (2) (2) 2A 1 () 2A.1 (1) LECSS2-T 1-1 (2) (2) (3) (3) () 2A.2 [AL. 2A.1] 1-2 2A.3 1-3 2A.4 1-4 2A.5 1-5 2A.6 1-6 2A.7 1-7 2A.8 1-8 . 8 23 8. 2B 2B.1 (1) LECSS2-T 1 (2) (2) (3) (3) 2B.2 [AL. 2B.1] 2 30 30.1 (1) () ()[Pr.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

2 !3 Replacement Parts D side No. 1 2 3 4 Part no. Note Description SY9000-50-1A SY9000-51-2A SY9000-51-4 SY9000-25-1 Manifold block assembly !

SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Not required Mounting orientation Unrestricted Shock/Vibration resistance m/s 2 Note 2) 150/30 Dustproof ( M8 connector conforms to IP65.)

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

45

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

3 Port Solenoid Valve

2 t JIS symbol 2a 2a (N.C.) 3 1 2a (N.O.) 1 3 Double r w u e y q i !0 !1 r w u e y q i !0 !1 o o !2 !3 !2 !3 JIS symbol 2a 2b t t 2a SOL.b SOL.a (N.C.) 1 3 2b 2a 2b SOL.a SOL.b (N.O.) 3 1 Replacement Parts One-touch Fitting (Metric Size) Description No. Material Component Parts Port Port size Part no. No.