XL

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Valve (Material: Stainless steel SUS304) 2. Valve seal (Maintenance part) 4.

Ejector Valve Unit Series ZYY/ZYX 1

Silencer (AN203-KM81 pc) 51 26 16 2.

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

Information

Bore size 12 to 25 Without auto switch, With auto switch CD hole H10 0.4 0.2 CX CL 4 x CN R M CT A + Stroke CW CZ Applicable Cylinders/Double Clevis Pivot Bracket Part No. (mm) Hexagon socket A CN part no.

Body Size: 4, Pilot Type: Internal Pilot, Stations: 6 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: NPT

Body Size: 4, Pilot Type: Internal Pilot, Stations: 3 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: NPT

Body Size: 4, Pilot Type: 1 (Internal Pilot), Stations: 6 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: N (NPT)

Body Size: 4, Pilot Type: 1 (Internal Pilot), Stations: 3 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: N (NPT)

C95

(n 4)/2 80 + 55 (n 4)/2 105 + 55 (n 4)/2 110 + 55 (n 4)/2 115 + 55 (n 4)/2 n A6 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 20 60 70 85 110 115 120 2 20 + 55 (n 2)/2 25 + 55 (n 2)/2 65 + 55 (n 4)/2 70 + 55 (n 4)/2 85 + 55 (n 4)/2 110 + 55 (n 4)/2 115 + 55 (n 4)/2 120 + 55 (n 4)/2 A59W

Cylinder with Lock

8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 50 55 60 65 70 D-M9mV D-M9mWV n 50 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 2

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) 100 120 125 130 15 25 105 140 30 D-F5NT 100 + 55 (n 4)/2 n = 4, 8, 12, 16 120 + 55 (n 4)/2 n = 4, 8, 12, 16 125 + 55 (n 4)/2 n = 4, 8, 12, 16 130 + 55 (n 4)/2 n = 4, 8, 12, 16 15 + 55 (n 2)/2 n = 2, 4, 6, 8 25 + 55 (n 2)/2 n = 2, 4, 6, 8 105 + 55 (n 4)/2 n = 4, 8, 12, 16 140 + 55 (n 4)/2 n = 4, 8, 12, 16 30 + 55 (n 2)/2 n = 2, 4, 6, 8 With n pcs

C95

2 !3 !4 !5 !6 !7 !8 !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) Q1 = M Y L2 max Q2 L2(3 x P) Size C1 = C (mm) D5.5 to 8 10 3 Y 1 Q1 L1 max X Size 10 5.5 to 14 X 1 3 7.5 to 9 15 3, 4 Y 1.5 Y = L2 = C2 = C L1(3 x P) 15 7.5 to 18 X 1.5 3, 4 9.5 to 10 20 3, 4, 5 Y 1.5 X = L1 = 20 9 to 20 X 1.5 3, 4, 5 11 to 13 30 3, 4, 5, 6 Y 2 Q2 = M 30 11 to 22 X 2 3, 4, 5, 6 14 to 15 40 3, 4, 5, 6, 8 Y 4.5 105 Series CRBU2 Axial: Top (Long shaft side) Axial: Bottom

CRBB-OM00004

screw 2 Fig. 1 8 Block retainer 2 7 Stopper block 2 No gap 6 Rubber bumper 1 5 Lever retainer 1 4 Stopper lever 1 3 Stopper ring 1 2 Auto switch 2 1 Rotary actuator 1 Product Fig. 2 No.

Title not found

Note 2) For NPT rhread type Note 2) Dfan glde s G1/4 (app cab e ro AFD30 and 40). Port size Accessories li.

Title not found

r^rE_aEIl_I ItrtrElEll+trMElr cG1 C D G l T T series i I .2: 3. .4, i.5. .6-l '?

V

Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy