Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.

LEC-OM07605CN

1) () 4) CN3 CN 3 CNP1 (1) (1) 6) 6) CN8 CN 8 CN1A CN1A CNP2 2) CN1B CN1B CNP3 CN2 CN2 () CN4 CN4 (10m IP65) 15)16)17)18) 11)12)13)14) DC24V LE-7)8)9)10) 1.

Table of Contents

to 6 stations Rc, NPT, G 1/8 IP66 (IP65 for solenoid valve.

Rotary Actuator/Vane Type

1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

IDX-OM-W034

IDFB55E, 75E) . 5 3 Chapter 6 References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 4 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 5 Chapter 7 Specification for Option K 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 Chapter 8 Specification for Option L 8 1 Safety instructions . 8 1 8

CRBU

Applicable shaft type: K (mm) L3 max W1 L1 max X (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size L3 = W1 = L1 = 10 10 0.5 to 2 Y 1 L2 1 L1 1 0.5 to 2 X 3 4.5 to 14 6.5 to 14 L4 = 15 15 Y = Y 1.5 L2 1 L1 1 0.5 to 2.5 X 4 0.5 to 2.5 8 to 18 L2 = 5.5 to 18 20 20 Y 1.5 L2 1 L1 1 0.5 to 3 X 4.5 0.5 to 3 9 to 20 6 to 20 X = 30 30 Y 2 L2 2 L1 2 0.5 to 4 X 5 0.5

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Ozone Resistant

Ozone Exposure Concentration and Its Physical Effects Standard Ozone Concentration in Working Environments in Various Countries Ozone Emitting Equipment and Devices 6. List of Ozone Resistant Products 1: Standard (HNBR) . 9 7. List of Ozone Resistant Non-HNBR Type Products 2: Series 80. 10 Reference Data: Photochemical Oxidants . 11 1.

2

(mm) 2 x Applicable tubing D Weight (g) Nylon Urethane 4 1/8 KQ2D04-01lS 10 8.2 15.8 23.3 24.3 13.3 5.7 6 3.2 6 6 3.6 9.2 1/4 KQ2D04-02lS 14 8.2 15.8 27.7 27.1 13.3 5.7 6 3.2 6 6 3.6 19 O N L1 M 6 1/8 KQ2D06-01lS 12 10.4 16.8 24.3 26.4 13.3 6.7 6 3.2 13.9 11 5.4 10.2 1/4 KQ2D06-02lS 14 10.4 16.8 28.7 29.2 13.3 6.7 6 3.2 13.9 11 5.4 19.1 3/8 KQ2D06-03lS 17 10.4 16.8 30.1 30.2 13.3 6.7 6 3.2

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

LEC-OM036xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

LEC-OM032xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 29 - 8.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

LEC-OM034xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 32 - 9.

LEC-OM038xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Air Slide Table Series MXJ

6 !8 q w !0 MXH o MXU MXS u MXQ i MXF !1 MXW @2 @1 @4 @3 !7 MXJ e t !5 @7 @6 @8 @5 With stroke adjuster MXP Axial piping type MXY MTS !2 Without stroke adjuster. With adjuster on extension end y Description No. Material Component Parts With Magnet, Rail Note Description No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.