High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

XL

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Ejector Valve Unit Series ZYY/ZYX 1

Ejector valve ZYY35LZ-10S-E15C Double solenoid (24 VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24 VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

Information

CQS 12 to 25 Can be mounted to an installed double clevis cylinder. 1 Series CQ2/CQS Double Clevis Pivot Bracket Dimensions/Part No. Bore size 12 to 25 Without auto switch, With auto switch CD hole H10 0.4 0.2 CX CL 4 x CN R M CT A + Stroke CW CZ Applicable Cylinders/Double Clevis Pivot Bracket Part No. (mm) Hexagon socket A CN part no.

Body Size: 4, Pilot Type: Common External Pilot, Stations: 5 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: NPT

Body Size: 4, Pilot Type: 2 (Common External Pilot), Stations: 5 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: N (NPT)

Cylinder with Lock

8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8)*1 75 + 50 (n 2) (n = 2, 4, 6, 8)*1 80 + 50 (n 2) (n = 2, 4, 6, 8)*1 85 + 50 (n 2) (n = 2, 4, 6, 8)*1 Double Acting, Single Rod Double Acting, Double Rod 1 70 75 80 85 D-F5m D-J59 D-F5mW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 1 90 95 100 110

C95

8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 6.5 4 0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note

CRBB-OM00004

head screw 1 M34L 4 Cross recessed round head screw 1 M34L 4 Cross recessed round head screw 1 M34L 3 1 M38L 3 1 M38L 3 1 M38L 2 Holding block 1 2 Holding block 1 2 Holding block 1 1 Switch block 1 1 Switch block (A) 1 1 Switch block (B) 1 No.

C95

4 i yq !3t!8!1!7w !6ui e!5 !

Title not found

X lmproved flow characteristics I Built-in gauges ftlodel (mm) New otd AC1000 I Easier assembly AC10 ac20 AC2000 AC2500 I lmproved ozone resistance 1 4 ac25 1 4 AC30 AC3000 1 4 4940 AC40-06 AC4000 AC4000 06 1 8 1 8 ac50 ACs000 1 8 ACss00 1 8 AC60 AC6000 1 8 I Larger bowl capacities I lmproved lubricator adlustment r 4 * , ' r | r e t & E t I l E \ A I t t l l t l t t L _ J t I \J f Better

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

Title not found

5/16'onetouch fitting 3/8' one-tolch iiltino 5/16'one{ouch fitlinq 3/8" one-touch litling NPT 1/4 N PT 3/8 NPT:I/8 NPTF 1/4 NPTF 3/8 NPTF 38 A, B ports mixed 'ln case ofmixed speclrcalion (l',{1. ndicale separalely on a manlold specticalon sheet 3/8' one-louch litl ng sv4000 Rc 3/8 G 1/4 G 3/8 G 3/S A.

V

8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering