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KK2P-23L -04L -06L KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK2S-23L -04L -06L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Body size Applicable tubing O.D. mm Part no.

S Couplers Series KK/KKH/KK13

KK2P-23L -04L -06L KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK2S-23L -04L -06L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Body size Applicable tubing O.D. mm Part no.

2

24 18.2 36.3 15.9 17 58.3 46.1 9 46.3 16 3/8 KQ2F16-03l 24 23.6 34.7 12.6 20.6 81 67 13 53.8 1/2 KQ2F16-04l 24 23.6 38.7 15.9 20.6 113 67 13 51.6 Note) D is maximum diameter. l/A: Brass, N: Brass + Electroless nickel plated INDEX 324 Series KQ2 Applicable Tubing: Metric Size, Connection Thread: M, R, Rc Dimensions Hexagon Socket Head Male Connector: KQ2S (Gasket seal) Connection thread M

One-touch Fittings

24 18.2 36.3 15.9 17 58.3 46.1 9 46.3 16 3/8 KQ2F16-03l 24 23.6 34.7 12.6 20.6 81 67 13 53.8 1/2 KQ2F16-04l 24 23.6 38.7 15.9 20.6 113 67 13 51.6 m: A (Brass), N (Brass + Electroless nickel plating) 106 B KQ2 Series Applicable Tubing: Metric Size, Connection Thread: M, R, Rc Dimensions Hexagon Socket Head Male Connector: KQ2S (Gasket seal) Connection thread M Model H (Width across flats)

KK/KK13

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no.

Proposals for Energy Saving

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no. Body size Part no.

S Couplers Series KK/KK13

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no.

Digital Flow Switch (Remote type monitor unit)

PF2A30 series PF2A31 series 1 to 10 L/min type (PF2A510) 5 to 50 L/min type (PF2A550) [11L]: [21L]: [51L]: 10 to 100 L/min type (PF2A511) 20 to 200 L/min type (PF2A521) 50 to 500 L/min type (PF2A551) [10L]: [50L]: PF2W30 series PF2W33 series [11L]: 10 to 100 L/min type (PF2W511) 0.5 to 4 L/min type (PF2W504) [04L]: [20L]: [40L]: 2 to 16 L/min type (PF2W520) 5 to 40 L/min type (PF2W540) PF2D30

4-channel Flow Monitor (Remote type monitor unit)

PF2A20 series 1 to 5 to 10 L/min type (PF2A510) 50 L/min type (PF2A550) [10L]: [50L]: [11L]: [21L]: [51L]: 10 to 20 to 50 to 100 L/min type (PF2A511) 200 L/min type (PF2A521) 500 L/min type (PF2A551) PF2W20 series 0.5 to 4 L/min type (PF2W504) (PF3W504) [04L]: [20L]: [40L]: [11L]: 2 to 5 to 16 L/min type (PF2W520) (PF3W520) 40 L/min type (PF2W540) (PF3W540) 10 to 100 L/min type (PF2W511)

VQ7-6/7-8

Nil 1 2 3 4 9 10 10 stations Silencer box 2 (B), 4 (A) port connection Nil SB Without With Rc3/8 (right side) Rc1/2 (right side) Rc3/8 (left side) Rc1/2 (left side) Rc3/8 (bottom) Rc1/ 2 (bottom) Mixed 1 (P), 3 (R2), 5 (R1) port connection 03R 04R 03L 04L 03Y 04Y Note) The mounting position of the silencer box corresponds to 3 (R2) and 5 (R1) port connections.

SMCs VQ7-6/7-8 series valve conforms to ISO standard 5591/I. A choice of metal or rubber seal increases compatibility with various operating and environmental conditions. Manifolds are available with a wide range of interface options to meet a variety of application requirements. The VQ7-6/7-8 has a smaller, space-saving profile and is lighter in weight than the VS7/VP7 series. Manifold

PF2x3.eng

] 1 to 10 L/min type (PF2A510) Indicator LED (OUT1) Set point 1 Set point 2 Hysteresis 1 Hysteresis 1 50% of max. rated flow [n_1] Input of the Set point 1 (OUT1) PF2A31 series [11L] 10 to 100 L/min type (PF2A511) button (SET) ON 50% of max. rated flow [n_2] Input of the Set point 2 (OUT1) [F_1] Input the Set value of instantaneous output PF2W30 series Selection of the connected sensor [04L

PF2x2.eng

OFF 50% of max. rated flow [n_1] Input of the Set point 1 [F_1] Input the Set value of instantaneous output Selection of the connected sensor Instantaneous output mode Window comparator mode PF2W2 series [04L] 0.5 to 4 L/min type (PF2W504) (PF3W504) P_1 P_2 Instantaneous flow Item Description 50% of max. rated flow [n_2] Input of the Set point 2 PF2D2 series [04d] 0.4 to 4 L/min type (PF2D504

Air Fittings & Tubing

(mm) Part No. 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04l 2.9 10.1 5.2 4 KQ2C-04A-l 8.5 5 2.2 0.1 2.2 4 KQ2C-04B-l 9.7 5 0.1 Kl 0.1 6 KQ2C-06l 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 Ml 2.2 6 KQ2C-06A-l 10.5 7 0.1 Hl 2.2 6 KQ2C-06B-l 12.0 7 0.1 8 KQ2C-08l 14.1

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

F 4 T 10 9 Silencer box 2(B), 4(A) port size Air release valve None With silencer box Nil 3/8 (Right side) 1/2 (Right side) 3/8 (Left side) 1/2 (Left side) 3/8 (Bottom) 1/2 (Bottom) Mixed 03R None With air release valve Nil SB 04R E 03L Thread type 04L 03Y Rc G NPTF Nil 04Y F 1(P), 3(R2), 5(R1) port size T 1/2 (Down side) 1/2 (Up side) 1/2 (Both sides) 3/4 (Down side) 3/4 (Up side) 3/4 (

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc Nil Rc 1/4 (Right side) Rc 1/2 (Right side) Rc 1/4 (Left side) Rc 1/2 (Left side) Rc 1/4 (Bottom side) Rc 1/2 (Bottom side) Mixed 1(P), 3(R2), 5(R1) port connection 03R 04R 03L 04L 03Y 04Y Nil SB None With NPTF T G F VZS Note) The mounting position

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc Nil Rc 1/4 (Right side) Rc 1/2 (Right side) Rc 1/4 (Left side) Rc 1/2 (Left side) Rc 1/4 (Bottom side) Rc 1/2 (Bottom side) Mixed 1(P), 3(R2), 5(R1) port connection 03R 04R 03L 04L 03Y 04Y Nil SB None With NPTF T G F VZS Note) The mounting position

VS7-6

/P, R1, R2 Port Air release valve/Voltage Piping/A, B port Silencer box (Bottom) 1 2 (Top) 1 2 (Both sides) 1 2 (Bottom) 3 4 (Top) 3 4 (Both sides) 3 4 (Right) 3 8 (Right) 1 2 (Left) 3 8 (Left) 1 2 (Bottom) 3 8 (Bottom) 1 2 Combination Without air release valve 1 1 Without air release valve With air release valve 04D 04U 04B 06D 06U 06B Without silencer box With silencer box 03R 04R 03L 04L

Stations: 2 Stations, AB Port: 04L (1/2, Left), Thread: T (NPTF), Control: None, PR Port: 04B (1/2, Both Sides), PR Thread: T (NPTF)

Stations: 3 Stations, AB Port: 04L (1/2, Left), Thread: T (NPTF), Control: None, PR Port: 04D (1/2, Bottom), PR Thread: T (NPTF)