Base mounted, plug-in type manifold for VQ2*0* valve, D-sub connector (25 pin standard, 15 pin option), Top or side receptacle position, Maximum 24 stations available as standard, 12 port sizes available, Optional DIN rail mount, VV5Q21 MANIFOLD, 4/5 PORT SOLENOID VALVE, J55, 1.81500 lb

Please contact us for the latest version.sales@ocaire.com, VV5Q21-12N7SDNWN3N-W, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 22, VV5Q* NO SIZE RATING, .00000 lb

Please contact us for the latest version.sales@ocaire.com, VV5Q21-08N7SDNWN2N-W, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 22, VV5Q* NO SIZE RATING, .00000 lb

Please contact us for the latest version.sales@ocaire.com, VV5Q21-10N7SDNWN3N-W, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 22, VV5Q* NO SIZE RATING, .00000 lb

Please contact us for the latest version.sales@ocaire.com, VV5Q21 MNFLD, SPL., VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 21, VV5Q* NO SIZE RATING, .00000 lb

Please contact us for the latest version.sales@ocaire.com, VV5Q21 MANIFOLD ASSY *LQA, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, 22, VV5Q* NO SIZE RATING, .00000 lb

Please contact us for the latest version.sales@ocaire.com, AB PORT FOR VV5Q21, VALVE, VV5Q* NO SIZE RATING, .02204 lb, ModelManifold pitch (mm)Flow-rate characteristicsApplicable cylinder bore size Metal sealRubber seal C [dm3/(s?bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Stations: 10 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: T (Terminal Box), Common: 0 (+COM)

Stations: 10 Stations, Port Size: ø6 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: -, Option 2: -, Option 3: -, Option 4: -, Option 5: -, CE Compliant: -

15

Motor Mounting: In-line Motor Mounting Diagram Motor type: NZ, NY, NX, NW, NV, NU, NT, NM2 Motor type: NZ, NY, NW, NU, NT [Included parts] Hexagon socket head cap screw/MM (Tightening torque: TT [Nm]) Motor [Provided by user] Motor flange PD Motor side hub Motor flange Motor mounting screw Motor Mounting dimension: FP Motor mounting screw [Provided by user] [Included parts] Motor side hub

High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

Table of Contents

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

Mechanically Jointed Rodless Cylinder Series MY1

( * * % # NW A GB N Z & ' ( . WW WW /*#! ( * * % # . . . 0 0 /*#! ( * * % # XX XX Centralized piping type Centralized piping type VV VV . . /*#! ( * * % # /*#!

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Aluminum High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

MY1

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)