5 Port Solenoid Valve

Dimensions Single unit Manifold 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting Mounting hole for M3 Mounting hole for M2.5 Manual override for residual pressure exhaust Manual override for residual pressure exhaust DIN rail clamping screw Stations12 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) Dimensions Single unit Manifold 2n x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting M3 mounting hole P = 11 M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw Residual pressure release manual override Stations 1 2 3 n D side U side

3 Port Solenoid Valve Series SYJ300/500/700

M5 x 0.8 Type 41 Applicable solenoid valve SYJ314SYJ314MSYJ324SYJ324MHow to Order SS3YJ3-41-05 --M3 Type 41 Type S41 Pilot valve is on the A port side. ( ) Valve mounting direction Stations 02 2 stations Pilot valve is opposite the A port side. Applicable blanking plate assembly SYJ300-10-2A Nil R port M5 x 0.8 : : A A R port 20 20 stations Pilot valve is on the A port side.

Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

For double solenoid For 3 position type: For 4 position type SX100-40-4DNegative common specifications Electric circuit diagram (With positive common and light/surge voltage suppressor) For single solenoid: SX100-41-4SFor double solenoid For 3 position type: For 4 position type SX100-41-4D[SOL.b] () Coil How to Order Lead wire length 2000 mm 10-SZ3160-5MO-M5 SX100-40-4S-20 COM (

SZ3000

Size and weight reduced by eliminating the manifold base C4/C6 One-touch fitting C4/C6 One-touch fitting (Elbow type) SZ3000 Series Height 31% reduction (Compared with SX3000-45 with DIN rail manifold and 5 stations) FREE LOCK Weight 12% reduction M5 port block assembly A port 1-3-1 B port 2 Series SZ3000 Precautions 1 Be sure to read before handling.

SZ3000

Size and weight reduced by eliminating the manifold base C4/C6 One-touch fitting C4/C6 One-touch fitting (Elbow type) SZ3000 Series Height 31% reduction (Compared with SX3000-45 with DIN rail manifold and 5 stations) FREE LOCK Weight 12% reduction M5 port block assembly A port 1-3-1 B port Series SZ3000 Precautions 1 Be sure to read before handling.

Base Mounted Metal Seal/Rubber Seal Series VQ

Dimensions VQZ Single unit Manifold VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 ~ = 4.5 Mounting hole for M3 Mounting hole for M2.5 ~ = 4.5 Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch

VQZ1000/2000/3000

VQZ2 20 1(R)-G-C4/C6/M5 3 4 5 300 (Lead wire length) 122 54.5 17.3 6 6 R2.5 3.4 B 4 11 15 SMC SMC 2 A Cover diameter 1.6 Cross section 0.34 mm2 24 22.7 mounting hole 66.5 2-C4, C6, M5 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 x 0.5 external pilot port (Only external pilot type (R)) M5: M5 thread 25 10 (For C4, C6) Courtesy of Steven Engineering, Inc.-230

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQ VV5QZ25C C C4 05 D VQ4 CE compliant Series 2 VQZ2000 VQ5 Option Nil Q CE marked Port size [4(A), 2(B) port] C3 C4 C6 01 Nil None DIN rail mounting (With standard DIN rail length) VQC 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting Rc 1/8 Compact body D Stations 02 VQZ Manifold type 5 Base mounted DIN rail mounting (Without DIN rail) 2 stations D0 Note) Note 1) The one-touch

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Fieldbus System

U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) 16 16 stations 02 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations A, B port size (Metric) A, B port size (Inch) Symbol A, B port P, E port Applicable series C3 3.2 One-touch fitting 8 One-touch fitting SV1000 C4 4 One-touch fitting C6 6 One-touch fitting C4 4 One-touch

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VFR VP7 How to Order Manifold VP4 Series VV5QZ25C C C4 05 Port size {4(A), 2(B) port} VQ 2 VQZ2000 One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 Rc(PT)1/8 C3 C4 C6 01 Stations 02 Manifold VQ4 2 stations 5 Base mounted style VQZ 20 stations 20 The One-touch fittings on the compact manifold are pressed in and therefore cannot be changed out.

Compact Manifold Regulator Series ARM5

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

Proposals for Energy Saving

M5 x 0.8 through hole 0.5MPa 0.35MPa (except 05) 0.45MPa (13,15 only) H M S 112 85.4 74 70 62 10 P ZM1 K5LZ-E15L-X235 26 30 Body type Conforms to the standard product.

Secondary Batteries

*Specifications and dimensions for the 90-series are the same as standard products. 3 EX124 Integrated Type (for Output) Serial Transmission System 90-SV-X166 Series IP65 Compliant How to Order Manifold Tie-rod base SS5V 2 V D 05 U 10S 90 X166 Series compatible with secondary batteries Specifications 1. Special SI unit: EX124D-SMJ1-X182 (Negative common) 2.

45

Applicable up to 16 solenoids. 20 16 08 20 stations 16 stations 8 stations Type 45T (9 pins terminal block type) Type 45T1 (18 pins terminal block type) 45T1 SS5X 3 05 U C4 D 45T SS5X 3 05 U C4 D Series Series 3 SX3000 5 SX5000 3 SX3000 5 SX5000 Option Option Terminal block mounting position When a longer DIN rail is desired than the specified stations, specify the station number to be required

45

Applicable up to 16 solenoids. 20 16 08 20 stations 16 stations 8 stations Type 45T (9 pins terminal block type) Type 45T1 (18 pins terminal block type) 45T1 SS5X 3 05 U C4 D 45T SS5X 3 05 U C4 D Series Series 3 SX3000 5 SX5000 3 SX3000 5 SX5000 Option Option Terminal block mounting position When a longer DIN rail is desired than the specified stations, specify the station number to be required