VM

02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Polyacetal roller One way roller lever Hard steel roller Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B VM-05B Polyacetal roller Hard steel roller VM120-01-06 VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Roller plunger Polyacetal roller Hard steel roller

ZP

Male thread Female thread 40 40 6 tube 06 50 50 8 tube 08 M5 x 0.8 A5 Pad type (Refer to Table (1) for applications.)

SY

(S = 0.25) AN120-M5 (Cv = 0.27) AS3001F-06 (S = 0.36) AN110-01 (Cv = 1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36)

One-touch Fittings

Spare Parts Symbol Size 23 3.2 04 4 06 6 Use the part number below to order the gasket for M3, M5, and M6 threads. Gasket for M3 thread: M-3G2 Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G For details on applicable tubing O.D. and port size combinations for each model, refer to the charts on the Dimensions page.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Speed Controller with Indicator

AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8 AS131FSG1-U10/32-03 AS131FSG1-M5-07 1/4 11.2

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(S = 0.25) AN120-M5 (Nl/min = 265) AS3001F-06 (S = 0.36) AN110-01 (Nl/min = 1904.1) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Nl/min = 549.6) 8 x 1m AS3001F-08 (Nl/min = 549.6) AS3001F-06 (Nl/min = 353.3) AS3001F-06 (Nl/min = 353.3) AN101-01 (Nl/min = 1089.5) AN110-01 (Nl/min = 1904.1) 10 x 1m AS4001F-10 (Nl/min = 873.5) 10 x 1m AS3001F-08 (Nl/min = 549.6) 12 x 1m AS4001F-10 (Nl/min = 1.17) 6 x 1m

V

56 72 88 104 120 136 152 168 L3 16 32 48 64 80 96 112 128 144 L4 8 24 40 56 72 88 104 120 136 H O W T O O R D E R M A N I F O L D T Y P E 40 S I D E P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 S I D E P O R T E D (N)VV3Z3 40 1 N U M B E R O F S TAT I O N S 02 2 Stations to 20 20 Stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) B3T

Metal Seal/Rubber Seal Series VQ Body Ported

(M5 thread) C6 (6) kit VQ5 VQZ N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4")

Hydraulic

x 1.0 30 +0.1 0 50 40 M8 x 1.25 185 145 57 79 M48 x 1.5 76 40 H -0.1 -0.4 D +0.07 0 25 16 M5 x 0.8 76 60 25 32 M16 x 1.5 26 16 +0.084 0 31.5 20 M5 x 0.8 90 70 30 40 M20 x 1.5 31 20 C +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M24 x 1.5 40 30 C-series K B +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M30 x 1.5 50 30 A +0.1 0 50 40 M8 x 1.25 185 145 57 79 M39 x 1.5 63 40 Double knuckle joint Material:

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

VM

-M5-02 VM123-M5-02S VM133-M5-02 VM133-M5-02S Straight plunger VM120-01-05 VM130-01-05 VM122-M5-05 VM132-M5-05 VM-08B VM-07BS VM-07B VM-06BS VM-06B VM-05B Polyacetal roller Hard steel roller Polyacetal roller Hard steel roller Roller plunger VM120-01-06 VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Cross roller plunger VM120-01-07 VM120-01-07S VM130

Compact Hydraulic Cylinder

32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H 0.1 0.4 D +0.1 0 50 40 M8 x 1.25 185 145 57 79 M48 x 1.5 76 40 +0.07 0 25 16 M5 x 0.8 76 60 25 32 M16 x 1.5 26 16 C +0.084 0 31.5 20 M5 x 0.8 90 70 30 40 M20 x 1.5 31 20 K B +0.1

KQ2

(mm) Mass (g) Model D1 D2 L Application KQ2C-04 4 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 10.1 5.2 2.9 4 KQ2C-04A8.5 5 2.2 0.1 Applicable tubing KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04B9.7 5 2.2 0.1 KQ2C-06 6 0.1 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 6 KQ2C-06A10.5 7 0.1 2.2 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 6 KQ2C-06B12.0 7

Base Mounted Metal Seal/Rubber Seal Series VQ

M5 fittings for M5 thread are attached without being incorporated.

F

M5 x 0.8 Metric 01 1/8 02 1/4 03 3/8 04 1/2 06 6mm Diffent Dia Reducer 08 8mm Diffent Dia Reducer 10 10mm Diffent Dia.