Base Mounted Wiring: Body Ported Common PE Individual Wiring Entry, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

VT317

VV317-02-051-02-A Valve stations A port size (Base piping) 1/4 Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs. PVT317-53-1A 1 pc.

Base Mounted Wiring: 10 (Base Mounted Non Plug-in Individual Lead Wire Entry), Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4)

Base Mounted Wiring: 10 (Base Mounted Non Plug-in Individual Lead Wire Entry), Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: Base Mounted Non Plug-in Individual Lead Wire Entry, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 1/4, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: Base Mounted Non Plug-in Individual Lead Wire Entry, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 1/4, Thread: NPTF, Control Unit: -, Release Valve Rated Voltage: -

MANIFOLD ASS'Y, VFS, 4/5 PORT SOLENOID VALVE, 0.00000 lb

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8), Thread: Rc, Control Unit: MP (Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 24VDC

Step Motor Driver （ Pulse input type ）

10 10 10 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 101 - Appendix 1.5 LER series setting value LER Step data default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 No. 0 0 0 0 0 0 Movement MOD ABS ABS ABS ABS ABS ABS Speed 280 420 280 420 280 420 Position 0.00 0.00 0.00 0.00

LEH_C

LEHZ(J) 10,16 20,25 32,40 LEHF 10 20 32,40 LEHS 10 20 32,40 / () 8.2 !

Electric Actuator Miniature Rod Type Miniature Slide table Type

25mm CCW CW 0 5 10 15 20 25 Stroke [mm] Origin 25mm CCW CW 10 15 20 25 30 35 Stroke [mm] Origin 25mm CCW CW -25 -20 -15 -10 -5 0 Stroke [mm] Origin 25mm CCW CW -15 -10 -5 0 5 10 Stroke [mm] Origin 25mm CCW CW -35 -30 -25 -20 -15 -10 Stroke [mm] 31 - Initial setting for the ORIG parameters Refer to the controllers (LEC series) operation manual for detail.

LEF-OM002xx

10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

LEY-OM007

50 60 [mm] bCW 50mm 0 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 10 50mm CCW CW -40 -30 -20 -10 0 10 [mm] -10 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -33- LEC []/ LEC 12: CCW 1: CW 2: CCW 1 LEY*16**:100LEY*25**:100LEY*32**:100 LEY*16*A*150LEY*25*A*200 100 20 550 / LEY16* 535 / LEY25* 530 / LEY32* 1000 () 10 0 CCW CW / P.37 6.1 1 CCW CW 2 3 OFF ON -34- 5. / A

Electric Actuator / Low profile slider type

Origin offset-10 Origin 50mm Motor side End side 0 10 20 30 40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

JXCx-OMU0026

1000 1000 50 40 10 100 0.0 0.0 5.0 Axis 1 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 2 Axis 2 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Axis 3 Absolute 50 50.00 1000 1000 0 0 10 100 0.0 0.0 0.5 Movement (ex.)

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

550 10 to 300 Parallel Stroke 701 to 800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 750 20 to 550 10 to 300 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 750 20 to 550 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 750 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 Max acceleration/deceleration