Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

Air Cylinder

Applicable bore size B C D d H NT-02 20 13 15.0 12.5 M8 x 1.25 5 NT-03 25, 32 17 19.6 16.5 M10 x 1.25 6 NT-04 40 22 25.4 21.0 M14 x 1.5 8 LT LF LE LY LG LD 2 x LD LD Part no. Applicable bore size L LC LD LE LF LG LH LR Mounting Nut/Material: Carbon steel (mm) CM-E020B 20, 25 24.5 8 6.8 22 15 30 30 10 CM-E032B 32, 40 34 10 9 25 15 40 40 13 d Part no.

One-touch Fittings

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.

Manifold Specifications

01 02 VK VZ Block plate Individual SUP spacer VF VFR VP4 VZS Double check spacer Plug-in type: VVZS3000-22A-1 Non-plug-in type: VVZS3000-22A-2 VFS RC 1/8, 1/4 VS4 SUP port VQ7 Individual EXH spacer Plug-in type: VVZS3000-R-02-1 Non plug-in type: VVZS3000-R-02-2 EVS VFN Double check spacer Individual EXH spacer EXH port ( ): Plug-in type 3-7-37 Series VZS3000 Exploded View of Manifold Non

AS

AS3301F-02 Meter-in type Meter-in type AS3211F-02 AS3311F-02 AS ASP ASN AQ ASV AK Component Parts Component Parts No.

5

Applicable bore size B C D d H NT-02 20 13 15.0 12.5 M8 x 1.25 5 LT LH NT-03 25, 32 17 19.6 16.5 M10 x 1.25 6 NT-04 40 22 25.4 21.0 M14 x 1.5 8 LF LE LY LG 2 x LD (mm) Mounting Nut Part no. Applicable bore size L LC LD LE LF LG LH LR LT LX LY LV Included pin part no.

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS3301F-02 AS TMH ASD AS AS-FE KE AS-FG AS-FP Meter-in type Meter-in type AS3211F-02 AS3311F-02 AS-FM AS-D AS-T AS-D AS-T ASP ASN AQ ASV AK VCHC ASS Component Parts Component Parts No.

/

Rating symbol DC 24 VS V100-61-5-05 24 VDC DC 12 VS V100-61-5-06 12 VDC 100/110 VS V100-61-4-01 100 VAC 200/220 VS V100-61-4-02 200 VAC 100/110 VS V100-61-4-01 110 VAC 200/220 VS V100-61-4-02 220 VAC 240 VS V100-61-4-07 240 VAC With Light/Surge Voltage Suppressor Rated voltage Part no.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

ITV

Made RP13A-12RB-13PA (71) 8.5 (14.3) 20 (14.3) 141 12 11 ARJ 141 12 9 Digital pressure display Digital pressure display AR425 to 935 M5 x 0.8 Solenoid valve EXH M5 x 0.8 Solenoid valve EXH Solenoid valve EXH Solenoid valve EXH ARX AMR 22 44 22 44 EXH (3) EXH (3) ARM OUT SUP OUT SUP ARP 15.5 15.5 IR CC-Link/ITV30-CC DeviceNet/ITV30-DE IN M12 x 1 Communication cable connection thread (Plug

LEC-OM071xx

8.29.1 ID Information Area.8-141 8.29.2 Common Parameter Area.8-142 8.29.3 Adjustment Operation Area.8-143 9.

A

42 58 45 125 141 42 1-1/4-12 58 45 M30x1.5 140 141 42 58 40 140 141 42 1-1/4-12 58 45 M36x1.5 160 155 47 64 50 160 155 47 1-3/8-12 64 50 Note) Dimensions are the same for Standard and Switch Capable D I M E N S I O N S ( M M) LARGE BORE STANDARD DOUBLE ACTING DOUBLE ROD SERIES (N)CQ2W Bore B CQ2 NCQ2 D E F NCQ2 i K L M N OB Q RB S Stroke (mm) CQ2 J CQ2 NCQ2 RA U Orifice A CQ2 Size C C H

Free Mount Cylinder Series CU

The maximum speed will be 141 mm/s. 50 32 25 20 10 5 16 Load mass (kg) 10 (2.5) 6 [Double acting (D), Single acting, Spring return (S)] 6 [Single acting, Spring extend (T)] 1 0.5 0.1 0.05 0.01 50 100 300 200 (141) 500 Maximum speed (mm/s) 2. Rod end allowable lateral load Make sure that the lateral load that is applied to the rod end will be no more than the values shown in the tables.

AC Servo Motor Driver (Pulse input type/Positioning type ）

COMMUNICATION FUNCTION 141 to 1440 14.

Base Mounted Wiring: 01T1 (Plug-in w/Terminal Block, One-piece Junction Cover), Stations: 14 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 14 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: -, Control Unit: -, Voltage Air Release Valve: -