MGP

Bore size (mm) Bore size (mm) DB DL DM HR LL MO Over 175st Over 75st to 175st 25st or less Over 25st to 75st Over 175st Over 75st to 175st Over 25st to 75st 98 25st or less 22 22 9.5 21 15 15 84.5 118 140 16 13.5 33.5 55.5 0 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 7 27 49 0 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59

CL

21 16 16 22 27 27 32 41 100 110 130 160 180 230 255 275 8 11 11 13 16 71 81 101 119 133 145 160 180 80 90 105 130 150 190 212 236 59 67 73 77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32 40 40 52 52 14 14 14 9.0 9.0 30 35 35

Electric Actuator/Slider Type

mm or more 17 Wear ring POM Stroke 101 mm or more 18 Screw shaft pulley Aluminum alloy No.

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

Table of Contents

61 32.8 23 5/16" 3/8 AS321F-03-11 AS421F-04-10 31.8 47.9 10 17.9 18.5 43.3 21 59 21 100 33.6 3/8" 24 (23.8) 24 (23.8) 1/2 28.6 25.4 57.6 42.1 49.6 50.1 AS421F-04-11 AS421F-04-12 33.6 17.9 48.9 12 47.9 21 20.9 100 22 101 34.6 3/8" 28.6 50.1 42.1 25.4 57.6 49.6 1/2 AS421F-04-13 35.2 21.7 49.5 22 101 Note 1) ( ) are the dimensions of NPT thread.

MG

Bore size (mm) Bore size (mm) DB DL DM HR LL MO Over 25 st to 75 st 98 Over 75 st to 175 st 118 Over 175 st 250 st 140 25 st or less 0 Over 25 st to 75 st 13.5 Over 75 st to 175 st 33.5 Over 175 st 250 st 55.5 25 st or 32 32 22 22 9.5 21 15 15 84.5 16 40 40 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 50 50 97 24 23 13 27 21 19 114 134 161 20 0 17 37 64 63 63 102 114 25 25.5 11 25 21

Air Slide Table

100 21 88 21 125 7 88 21 150 33 88 21 Dimensions other than those shown below are the same as the standard product.

ZX

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

Compact 5-Port Solenoid Valve

250 L5 20.5 22 24 19.5 21 23 18.5 20 22 23.5 19 21 22.5 18 20 Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions n L 17 18 19 20 21 22 23 24 L1 236 245 254 263 272 281 290 299 L2 196.4 205.4 214.4 223.4 232.4 241.4 250.4 259.4 L3 273 285.5 285.5 298 310.5 310.5 323 335.5 L4 262.5 275 275 287.5 300 300 312.5 325 L5 21.5 23.5 19 20.5 22.5 18 19.5 21.5 24 JSY1000

Free Mount Cylinder

(mm) DQ HQ HP 2.6 19.5 36.5 4.8 19.5 36.5 7 19.5 36.5 9 19.5 36.5 7 20.5 37.5 9 20.5 37.5 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 DQ HQ HP 18 29 50 15 27.5 48.5 12 25 46 9 20.5 42.5 7 20.5 42.5 18 25 46 12 24 45 18 21.5 42.5 15 21 42 12 21 44 9 19.5 41.5 DQ HQ HP 7 19.5 41.5 2.6 19.5 41.5 4.8 19.5 41.5 ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 12 21 44 15 21 44 18 21.5 44.5 23 23 46 28 23 46 35 23.5 46.5 12 24 47

5

Applicable bore size (mm) A A1 E1 L1 MM RR1 U1 NDH10 NX I-G04 32, 40 42 14 22 30 M14 x 1.5 12 14 10 +0.058 0 18 0.3 0.5 I-G05 50, 63 56 18 28 40 M18 x 1.5 16 20 14 +0.070 0 22 0.3 0.5 I-G08 80 71 21 38 50 M22 x 1.5 21 27 18 +0.070 0 28 0.3 0.5 I-G10 100 79 21 44 55 M26 x 1.5 24 31 22 +0.084 0 32 0.3 0.5 * A knuckle pin and retaining rings are included.

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm or more 17 Wear ring POM Stroke 101 mm or more 18 Screw shaft pulley Aluminum alloy No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators (A, B port) 3/8, 1/4 21 13.5 (Light/surge voltage suppressor) (For mounting) 2 x 4.3 43.1 21.5 21 61 Manual override A B PE 38 46 + B A + X EA EB P 21.5 G: Approx. 300 H: Approx. 600 77 121.4 [125.8] 21 (External pilot port) M5 x 0.8 M5 x 0.8 (Lead wire length) (Pilot EXH port) 58.5 [65.5] Air Preparation Equipment

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 10, Type: Common Exhaust, Thread: -

Series: 5 (VFA5000), Manifold: 20 (P.R Port Size 3/8), Stations: 10, Type: 1 (Common Exhaust)

Hydraulic

M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5