Air Cylinder

10.5 40 41 46 20 77 90 102 115 140 12.5 25 37.5 50 75 181 194 206 219 244 27 10.5 Symbol Stroke (mm) With Air Cushion Boss-cut Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 25 8 20 M5 x 0.8 95 32 12 20 M6 x 1 97 40 13 21 M8 x 1.25 125 Bore size WA 20 13 25 13 32 13 40 16 Bore size ZZ Without With rod boot 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 103 130 143

Electric Actuator

lock With lock 15 to 100 89.5 124.5 250 275 265.5 295.5 300 325 315.5 345.5 25 24.5 20 44 45.5 57.6 57.7 94.7 13 24 17 M8 x 1.25 101 to 400 20 to 100 96 32 26 25 51 56.5 69.6 79.6 116.6 M8 x 1.25 13 31 22 101 to 500 126 W V U Q PB PA OB OA NB NA M L Stroke range Size (mm) With lock Without lock 15 to 100 25 14.5 34 8 37 38 15.6 9.3 28 0.9 15.3 146 196 M5 x 0.8 101 to 400 20 to 100 32 M6 x

CM2

Stroke Boss-cut Style Built-in One-touch Fittings Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ ZZ S S ZZ Bore size (mm) 20 25 32 40 Bore size (mm) Bore size (mm) ZZ ZZ ZZ ZZ ZZ Q P 20 20 191 137 166 112 141 87 128 153 178 6 21.5 25 25 195 137 170 112 145 87 132 157 182 6 24.5 32 32

CM2

to 300 75 75 75 75 51 to 100 76 80 80 84.5 101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 20 25 32 40 109.5 134.5 Boss-cut style Built-in One-touch fitting With air cushion (mm) ZZ G 8 8 8 11 P 6 6 6 8 Q 23 26 28.5 32.5 Bore 20 25 32 40 Bore 20 25 32 40 N1 17.5

CJ2

(SNJ-016B for 10, SNKJ-016B for 16) A BA BB CA CB F FB FC FT FX FY FZ GA H KA MM NA NB NN Bore size (mm) 10 16 15 15 12 17 14 8 17.5 5.5 2.3 33 20 42 8 28 4.2 M4 x 0.7 12.5 5.5 M10 x 1.0 15 18.3 18.3 20 20 8 19 5.5 2.3 33 20 42 8 28 5.2 M5 x 0.8 12.5 5.5 M12 x 1.0 Dimensions by Stroke Symbol S Z 5 to 15 Bore size (mm) Stroke 76 to 100 101 to 125 126 to 150 76 to 100 101 to 125 126 to 150

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

C85

With Rod Boot (mm) Item h AM C e f K KK 1 to 50 Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 109 M8 x 1.25 71 84 96 134 159 25 22 10 36 20 8 M10 x 1.25 74 87 99 112 137 162 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

CJ2

M5 X 0.8 NTJ-015A (mm) S Z MM NB A NA R B U C CD (cd) 3.2 6.5 CX CZ D GB H 101 to 126 to 101 to 126 to 5 to 16 to 31 to 46 to 61 to 76 to 5 to 16 to 31 to 46 to 61 to 76 to Bore 150st 53 54 65 66 77 78 84 108 126 138 100st 125st 150st 100st 125st 15st 30st 45st 60st 75st 15st 30st 45st 60st 75st 10 16 M4 X 0.7 M5 X 0.8 22.5 15 15 5.5 5.5 5 8 12 18 8 10 14 20 3.3 5 12 18 4 5 18 23 20 20

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

VDC 12 to 24 VDC Load Blue LINE () Blue DC () Load Install the load either on the LINE (+) or LINE () side. 1 to 5 VDC 4 to 20 mADC 0 to 101 kPa A 0 B 101 kPa C 10.1 kPa Rated pressure range Range Analog output [mA] 5 20 Analog output [V] For vacuum For compound pressure 100 kPa to 100 kPa 100 kPa 100 kPa 0 to 1 MPa 0 1 MPa 0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa 50 kPa 1 0.6

Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

CATALOG

20 14 72 M10x1.5 7 18 5 80 300 37 40 101 50 25 20 89 M10x1.5 11 22 5 100 300 37 40 101 60 30 20 110 M12x1.75 11 26 7 *Trunnion mounting threads in flats NA are not available for 80, 100 bores.

C76

AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Stroke Bore 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82

C76

AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Stroke Bore 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82

Battery-less

15 to 100 14 20 18 36 14.5 10 101 to 200 32 40 20 to 100 14 22 18 36 18.5 10 101 to 200 L CW CU RR +0.4 +0.2 CX 0.1 0.3 CZ Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

Air Cylinder Series MB

(n 2) n MB 2 (Different surfaces, Same surface) 20 25 D-Y7W D-Y7WV 1 20 25 20 + 10 (n 2) 20 + 15 (n 2) 25 + 10 (n 2) MB1 n 2 (Different surfaces, Same surface) 20 30 D-Y7BAL CA2 1 20 30 20 + 10 (n 2) 20 + 15 (n 2) 30 + 10 (n 2) n CS1 Note 1) n = 3, 4, 5 Note 2) Center trunnion type is not included.

Table of Contents

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Table of Contents

101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 50, 63 50, 63 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 100 100 80 80 Load

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

Environment

400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 46 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25

A_HEC-OM-K001

Pressure Loss Fluid: Water HED003 35 30 Pressure loss kPa 25 HED003-HW13 20 15 10 HED003-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-13 Recirculating fluid Pressure loss (HED003) HED005, HED007 35 30 Pressure loss kPa 25 HED005-HW13 HED007-HW13 20 15 10 HED005-HW19 HED007-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-14 Recirculating fluid Pressure loss (HED005