Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 10, Type: Common Exhaust, Thread: NPT

Table of Contents

101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread 10 83 49 23 Width across flats 12 20 121 59 51 30 131 69 40 167 79 77 50 177 89 10 13 38 22 D C B 2.5 6 M10 x 1 14 3 10 83.5 49.5 23 20 121.5 59.5 51 30 131.5 69.5 40 167.5 79.5 77 50 177.5 89.5 Width across flats 7 16 38.5 22.5 N4 N6 U4 U6 A10 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 E2

Air Slide Table

30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height

MGP

20 30 40 50 51 100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight

Electric Actuators

C 30 D Refer to page 300 for mounting.

MGP

pressure (MPa) Bore size (mm) Piston area (mm2) Operating direction 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGP 113 102 90 79 68 57 45 34 23 113 OUT 6 12 85 77 68 60 51 43 34 26 17 85 IN MGQ 201 181 161 141 121 101 80 60 40 201 OUT 8 16 151 136 121 106 91 76 60 45 30 151 IN MGG 314 283 251 220 188 157 126 94 63 314 OUT 10 20 MGC 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246

Table of Contents

C 30 D Refer to page 300 for mounting.

Made to Order

MGC series 20 to 50 MGC Series (mm) C port SZ + Stroke B Cushion valve (Width across flats WH) Front mounting flange Bore size (mm) GC GD SA SB W 1 W 2 A, B port A port W 2 W 1 A 20 25 32 40 50 30 30 21 9 50 87 30 30 C port D port 21 9 50 87 B port W 2 W 1 10 A' 25 30 23 9 52 91 20 20 24 8 59 99 Cushion valve (Width across flats WH) D port ZZ + Stroke A + Stroke B SB + Stroke B SA + Stroke

LX

C 30 D Refer to page 300 for mounting.

LX

C 30 D Refer to page 300 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1

MG

101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

Table of Contents

or less 40 or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

SY

Connector assembly part numbers 30 4A SY100 For DC: DIN terminal 30 1A SY100 For 100VAC: With surge voltage suppressor (DS) 30 2A SY100 For 200VAC: No.1 () (+) 30 3A SY100 For other AC: ZNR Coil 30 A SY100 Without lead wires: No.2 (+) () (Connector, socket x 2pcs. only) With indicator light/ surge voltage suppressor (DZ) Lead wire length 300mm Nil No.1 () (+) 6 600mm 1000mm 10 15 20 25 30

Air Cylinder

) 40 10 (12) 14 0.032 0.059 65.5 78.7 118 (125) 130 (139) 50 12 (13) 16 0.032 0.059 80 98.6 136 (147) 150 (162) 63 12 (13) 18 0.032 0.059 98 119.2 136 (147) 150 (162) 20 30 18 55 27 15.5 10.5 113 (121) 126 (134) 25 30 19 62 32 16.5 10.5 120 (128) 133 (141) 32 35 19 62 38 18.5 10.5 123 (130) 135 (143) 40 35 19 70 48 21.5 10.5 138 (145) 150 (159) 50 40 19 78 59 24 10.5 156 (167) 170 (182) 63

Compact Hydraulic Cylinder

Made to Order Change of Rod End Shape 1 CH2 Series Mounting type Bore size Rod size series Stroke Cylinder options X A0 Indicate the rod end shape pattern symbol A1 A2 A3 C0.5 30 30 30 30 D D D d d F Width across flats F F H H H A4 A5 A6 30 30 30 D D D d D d 30 30 Width across flats Width across flats F Width across flats F F H H H Note) Female thread effective depth should be no more

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulator) 2.35 mm Min. bending radius (Fixed) 110 mm Power Supply Cable/Gateway Decentralized System (64 Points) For DeviceNet For PROFIBUS DP @6@7EX500-AP 050 S Connector specification Cable length (L) Angle connector type 010 1000 mm 050 5000 mm S Straight A Angle M12 14.9 Straight connector type 14.9 1 M12 6 6 5 1 2 2 28.3 5 4 3 4 3 30 5 50 L 25.3 30 5 50 40.7 27 Socket connector

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt Model C Mounting bolt CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-