ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

SMC

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Serial Network

16 16 16 16 16 16 16 0 0 0 0 0 0 0 VQ, SX, SY & SV VQ2000/4000/5000 SQ1000/3000, SZ3000/5000 (N)VFR/S, (N)VZS, ISO VQ, SX, SY & SV VQ2000/4000/5000 SQ1000/2000, SZ3000/5000 EX120/121/122-SUW1 EX123 (U, D)-SUW1 EX140-SUW1 IN313-UW1 EX120/121/122-SUH1 EX123 (U, D)-SUH1 EX140-SUH1 N Y N NKE Wire Saving System 13 NKE N N Y N NKE Wire Saving H System EX120/121/122-SCS1 EX120/121/122-SCS2 EX124

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-M-01 DIN Terminal (D): 10-SYJ7223-D-01 M8 connector (WO): 10-SYJ7223-WO-01 Approx. 300 (Lead wire length) 65 31.5[38.5] MAX.10 57.5 16.1 46.2 31.1 M8 x 1 36 18.5 42.6[49.6] Approx. 300 (Lead wire length) 2-3.2 (For mounting) 2-3.2 127.2[131.6] 2-3.2 (For mounting) 2-3.2 107.6[112] (For mounting) 125.4 145.4 147.2 110.6 (For mounting) 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25

CXS

Seal kits consist of items 19 through 21, and can be ordered by using the seal kit number corresponding to each bore size. 13 Series CXS Construction: Ball Bushing Bearing CXSL6 CXSL10 CXSL15 CXSL20 to 32 Parts list Parts list: Standard piping Description Material Synthetic resin Note 2) Note No. 18 19 20 21 22 23 24 25 26 27 28 29 Description Material Aluminum alloy Special steel Special

Table of Contents

Support brackets are not for mounting; use them solely for providing support. 8-14-21 21 Series MY3A/3B Floating Bracket Facilitates connection to other guide systems.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

CL

21 16 16 18.5 60 70 86 102 116 145 161 182 32 40 40 52 52 15 17 17 21 21 16 16 18.5 22 27 27 32 41 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40 45 50 65 75 85 100 106 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot

CV/MVGQ

Made to Order Specifications (For details, refer to page 10-21-1.)

CV/MVGQ

Made to Order Specifications (For details, refer to page 10-21-1.)

MGG

21 37 47.5 107 (115) 104 46 57 100 13 Rc 1/8 M6 x 1 depth 13 31 175 37 11 28.3 12 (14) 21 40 104 48 107 (115) 52 65 114 16 Rc 1/8 M6 x 1 depth 13 38 201 37 11 31.3 12 (14) 21 43 106 49 110 (118) 62 84 138 Rc 1/8 20 47 M8 x 1.25 depth 16 238 44 11 38.3 12 (15) 25 52.5 53 121 (130) 123 75 94 164 25 Rc 1/4 58 M10 x 1.5 depth 21 285 55 16 44.5 14 (16) 26 58.5 59 137 (149) 140 For long strokes

Battery-less

to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80 LEYG40M L mE A 24 to 30 50 to 65% B/C 21 to 30 60 40 0 20 Min. 20% 10 0 20 30 40 50 60 70 Max. 65% Model LEYG16M LmE

Free Mount Cylinder

(mm) DQ HQ HP 2.6 19.5 36.5 4.8 19.5 36.5 7 19.5 36.5 9 19.5 36.5 7 20.5 37.5 9 20.5 37.5 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 DQ HQ HP 18 29 50 15 27.5 48.5 12 25 46 9 20.5 42.5 7 20.5 42.5 18 25 46 12 24 45 18 21.5 42.5 15 21 42 12 21 44 9 19.5 41.5 DQ HQ HP 7 19.5 41.5 2.6 19.5 41.5 4.8 19.5 41.5 ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 12 21 44 15 21 44 18 21.5 44.5 23 23 46 28 23 46 35 23.5 46.5 12 24 47

TABLE OF CONTENTS

21, 31 NPT 1/2 AN CONNECTOR MISCELLANEOUS OPTIONSsee page 76 All Models BODY OPTIONSsee page 80 SPLICE BOX HOUSING 3.52 3.22 (81.8) .34 (8.6) FINE METERING SILVER SHADING RING All Models 2.50 (63.5) (89.4) Model 21 All Models JIC HOUSING METERING TO ORIFICE ALUMINUM SHADING RING Model 21 Model 21 All Models YOKE MANUAL OVERRIDE BUILT IN MUFFLER All Models 21*, 71 All Models 1.88 (47.8) MOUNTING

VQC

0 (Terminal block) T Kit 21 Note) Drawing shows VQC1000 type. VQC Base-Mounted Type Manifold Exploded View Manifold Assembly Part No. Housing assembly and SI unit/Input block Description Note Applicable model Part no. No.

5 Port Solenoid Valve, Series VQC

Note) Drawing shows VQC1000 type. 21 Base-Mounted Type Manifold Exploded View Series VQC Manifold Assembly Part No.

CHKD/CHKG

14 70 28 126 24 27 24 M20 x 2.5 8 11 43 24 104 83.5 20 depth 13 140 16 77 35.5 146 30 33 33 M27 x 3 9 13 52 30 121 102 23 depth 15.2 161 18 88 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 123.5 26 depth 17.5 189 22 106 56 208 50 43 45 M39 x 4 21 17 76 40 174 149 Note 1) Body dimensions are the same with or without auto switches.