Table of Contents

MGP MGPA12-150 MGP MGPA12-100 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 MGPA -200 32 32 40 40 0.2 0.4 MGP MGPA12-75 MGPA12-75 MGPA -150 32 32 40 40 0.15 0.3 MGPA -100 32 32 40 40 0.1 0.2 MGPA12-50 MGPA12-50 MGPA -50 32 40 MGPA -50 32 32 40 40 0.05 0.1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

Air Cylinder Series CM2

4 4 8 7 9 8 37 107 19 10 9 34 30 60 75 30 14 10 32 32 52 36 108 116 118 40 25 40 55 20 21 Up to 300 Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3) Exhaust throttle SQ Series 38 1 4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 VFS Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 VFR VQ7 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) External Pilot (Note 2) External Pilot (Note 2) DIN terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 External pilot Sub-plate External pilot External pilot DIN terminal M8 connector SY9 40 Standard Option Made to order

MGP

18.5 18.5 101 to 250st 43 49 40 to 100st 55 65 101 to 250st 85 95 10 to 39st 1 3 40 to 100st 13 19 101 to 250st 43 49 12 16 12 16 A E A E Bore size (mm) Bore size (mm) 20 to 74st 53 53.5 75 to 200st 84.5 85 201 to 400st 122 122 20 to 74st 0 0 75 to 200st 31.5 31.5 201 to 400st 69 68.5 40 to 124st 80 85.5 20 to 39st 63 69.5 125 to 200st 104 104.5 201 to 400st 122 122 20 to 39st 10 16 40 to

Compressed Air Cleaning Filter Series

x 63 x 158 76 x 76 x 172 90 x 90 x 204 122 x 122 x 259 160 x 160 x 311 63 x 63 x 158 76 x 76 x 172 90 x 90 x 204 106 x 106 x 225 122 x 122 x 259 160 x 160 x 311 76 x 76 x 103 90 x 90 x 132 106 x 106 x 151 122 x 122 x 187 160 x 160 x 291 AFF6 AFF22 AFF37 AFF55 AM200 AM300 AM400 AM500 AM600 AMD100 AMD200 AMD300 AMD400 AMD500 AMD600 AMF200 AMF300 AMF400 AMF500 AMF600 100 x 100 x 253 150 x 140

Table of Contents

x 1.5 Up to 700 1/8 146 9 10 40 40 60 196 206 20 42.5 40 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 209 219 22 40 51 M32 x 2 53 Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

A

12 M8 x1.25x16l M8x1.25x8l 76 M8x1.25 9 19 56 19 20 11.5 10 50 CXS32-40 40 122 152 CXS32-50 50 132 162 CXS32-75 75 157 187 70 212 CXS32-100 100 182 Courtesy of Steven Engineering, Inc. !

V100

Note 3) For the inch-size One-touch fittings, refer to page 4-14-40.

Air Cylinder

90 (102) 17.5 22 13 75.5 157.5 (169.5) 80 86 108 (122) 20 28.5 14 95 188.5 (202.5) 100 106 108 (122) 20 30 16 95 192 (206) 20 30 18 55 27 15.5 10.5 67 130 (138) 25 30 19 62 32 16.5 10.5 74 137.5 (145.5) 32 35 19 62 38 18.5 10.5 75 139.5 (147.5) 40 35 19 70 48 21.5 10.5 83.5 155 (164) 50 40 19 78 59 24 10.5 95.5 177.5 (189.5) 63 40 20 78 72 24 10.5 95.5 177.5 (189.5) 80 52 10 80 59 104

ISO Cylinder

rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (

LX

40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2 0.1 0.1 Refer

2

-A, AFD30-A/40-A).

LX

40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2 0.1 0.1 Refer

Air Slide Table Series MXQ

It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

ZP

K 49 32.9 24 2.5 M6 x 1 6 10 8 M5 x 0.8 16 50 33.9 25 25 63.6 45.8 35 3.5 12 12 M8 x 1.25 40 71.1 53.3 42.5 4 25 B8 63.6 45.8 35 3.5 M8 x 1.25 8 12 12 M8 x 1.25 40 71.1 53.3 42.5 4 04 06 08 ZP R D B6 D2 Construction p. 117 Adapter Assembly p. 122 Dimensions Per Vacuum Inlet Model K L M Fitting part min. hole size Vacuum inlet direction q Pad dia.

MGP

18.5 18.5 101 to 250st 43 49 40 to 100st 55 65 101 to 250st 85 95 10 to 39st 1 3 40 to 100st 13 19 101 to 250st 43 49 12 16 12 16 A E A E Bore size (mm) Bore size (mm) 20 to 74st 53 53.5 75 to 200st 84.5 85 201 to 400st 122 122 20 to 74st 0 0 75 to 200st 31.5 31.5 201 to 400st 69 68.5 40 to 124st 80 85.5 20 to 39st 63 69.5 125 to 200st 104 104.5 201 to 400st 122 122 20 to 39st 10 16 40 to

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) Operating temperature range Work load Speed 5 to 40 (with no condensation) 10 (4) horizontal/5 (4) vertical Note 1) N.C.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

40 to +80C 25 to +60C 40 to +80C Cable 25 to +60C 40 to +80C 25 to +60C 40 to +80C Min. bending radius (Fixed) 40 mm 21.7 mm 40 mm 21.7 mm Protection class IP67 (Only with screw tightened) Allowable repeated insertion/withdrawal 200 Material of knurl Brass (Nickel plating) Zinc die-cast (Nickel plating) Brass (Nickel plating) Zinc die-cast (Nickel plating) Contact (Surface treatment) Phosphor

MG

MGP MGPA12-150 MGP MGPA12-100 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 MGPA -200 32 32 40 40 0.2 0.4 MGP MGPA12-75 MGPA12-75 MGPA -150 32 32 40 40 0.15 0.3 MGPA -100 32 32 40 40 0.1 0.2 MGPA12-50 MGPA12-50 MGPA -50 32 40 MGPA -50 32 32 40 40 0.05 0.1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area