Series: 1 (VFA1000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 05, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: VFA3000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 05, Type: Common Exhaust, Thread: NPT

Series: VFA1000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 05, Type: Common Exhaust, Thread: NPT

VZ3000

60 Hz DC Coil rated voltage (V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Note) Power consumption (W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30

1

SY7000221-1A [for 10 valves (30 pcs.)] SY7000222-1A [for 10 valves (30 pcs.)]

LEY-OM007

DRIVE /P.30 1 /code1-051 No. 3 RESET 15ms30ms /P.30 1 No. 4 No. PLC No. 15ms 1 IN* 30ms DRIVE /P.30 1 / No. OUT 2 15ms30msmsec /P.30 1 No. OUT 3 No. PLC /P.30 1 No. OUT -52- No.

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 25 or less 30 or less 30 or less 18 or less 20 or less 10 or less 12 or less 28 or less 30 or less 28 or less 30 or less 28 or less 30 or less 21 or less 33 or less 10 or less 15 or less 33 or less 35 or less 33 or less 35 or less 33 or less 35 or less 12 or less 12 or less 10 or less 10 or less 20 or less 25 or less 20 or less 25 or less 25 or less 14 or less 15 or less 10 or less

LEF-OM002xx

30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200 3,000 Max.acceleration/deceleration

Step Motor Driver （ Pulse input type ）

20 30 20 30 ORIG ACC / DEC 1000 1000 1000 Creep speed 20 30 20 30 20 30 ORIG sensor 0 0 0 ORIG SW Dir 0 0 0 Undefined parameter21 0 0 0 103 - Appendix 1.6 LEP series setting value LEPY Step data default Model LEPY6 LEPY10 Lead [mm] 4 8 5 10 No. 0 0 Movement MOD ABS ABS Speed 150 300 200 350 Position 0.00 0.00 Acceleration 3000 3000 Step data default Deceleration 3000 3000 Pushing force 100

5-Port Solenoid Valve

SY7000221-1A [for 10 valves (30 pcs.)] SY7000222-1A [for 10 valves (30 pcs.)]

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 2) Min. operating frequency is once in 30 days.

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

LEH_C

) ()Amm b)30 31 =30 1) ()Amm 2) CW () (CW )30 29 30 1 29 8 - (LEC ) (LEC ) () 2:CCW 1:CW () 2:CCW () 1) 1 100 40 100 / LEHZ(J),LEHF,LEHS 50 100 / LEHZJ10L,LEHZJ16L 2) 100 5 50 LEHZ(J) , LEHS 5 20 LEHF10 5 30 LEHF203240 3) 10 2,000 10 0: 0 21 0 1) P.53 8.3 2) 3) 4) P.40 7.1 9 - 6. !

DOC1023126

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQY25 EQY32 Storoke [mm] 30 to 400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

550 10 to 300 Parallel Stroke 701 to 800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 30 to 750 20 to 550 10 to 300 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 750 20 to 550 10 to 300 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 750 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 Max acceleration/deceleration

JXCx-OMU0026

20 30 20 30 20 Min. speed [mm/s] (Speed tuning control) 38 25 38 25 38 25 -113No.

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Electric Actuator / Low profile slider type

40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

DOC1023125

Speed[mm/s] Stroke Range 701 to 800 20 to 550 12 to 330 6 to 180 3 to 90 24 to 750 16 to 500 8 to 250 4 to 125 30 to 1140 20 to 760 10 to 350 5 to 175 801 to 900 24 to 610 16 to 410 8 to 200 4 to 100 30 to 930 20 to 620 10 to 280 5 to 140 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 4 to 85 30 to 780 20 to 520 10 to 250 5 to 125 1001 to 1100 30 to 660 20 to 440 10 to 220

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.