Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

Table of Contents

x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105 1.0133 x 102 1.0332 x 104 7.6000 x 102 1.0133 x 101 1.0133 1.0332 1.4706 x 10 1 9.8067 x 103 9.8067 x 105 1 x 104 9.6784 x 105 7.3556 x 102 1.4220 x 103 9.8067 x 106 9.8067 1 1.3332 x 102 1.3332 x 101 1.3332 x 103

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

2

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075 x 1 m SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN200-02 AN200-02 AN202-02 Conditions [When using SGP (steel

Table of Contents

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

A

50 25 20 89 M10x1.5 11 22 5 100 300 37 40 101 60 30 20 110 M12x1.75 11 26 7 *Trunnion mounting threads in flats NA are not available for 80, 100 bores.

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

Serial Transmission System Series EX250 Series EX500

For 3 stations For remote I/O A1W DeviceNet PROFIBUS-DP CC-Link 16 For 16 stations A2W 0 Without SI unit Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Note 1) Double wiring specifications 08 02 8 stations 2 stations Note 2) Supply/Exhaust block assembly specification Specified

Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

EA EB P M5 x 0.8 62.8 107.2 [111.6] (Lead wire length) G: Approx. 300 H: Approx. 600 (Pilot EXH port) 22 50.6 [57.6] 9.5 18 18 28 (P, EA, EB port) 1/4 56 L plug connector (L): 10-SY5240(R)-L-02 M plug connector (M): 10-SY5240(R)-M-02 DIN terminal (D, Y): 10-SY5240(R)-02 M8 connector (WO): 10-SY5240(R)-WO-02 D Y Applicable cable O.D. 3.5 to 7 (Lead wire length) 127

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

LS + Stroke ZZ + Stroke CJ1 82.5 45 5 22 13 82 106 101 55 5 28.5 14 100 125 121 65 7 30 16 120 150 CJP Other dimensions are the same as basic style.

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Table of Contents

300 200 0.5 10 20 30 31 50 100 101 300 200 DStroke (mm) Stroke (mm) -X MGPL32 to 63 MGPL32 to 63 50 50 20Data Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load

Air Cylinder

With Rod Boot (mm) B3 e f h l Z Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 18 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 32 36 18 72 85 97 110 135 160 185

Compact 5-Port Solenoid Valve

PG/PGC: Flat ribbon cable (20 pins) PH/PHC: Flat ribbon cable (10 pins) Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 09 9 stations 02 2 stations Specified layout*2 (Up to 18 solenoids available) 04 4 stations 02 2 stations Specified layout*2 (Up to 8 solenoids available) o Mounting and Option * Enter the number of stations inside m