Stations: 5 Stations, Piping: P Common, R Individual, A Side, Thread: F [G (PF)], Option: -, CE/UKCA Compliant: -

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

Stations: 8 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]

Stations: 5 Stations, Piping: 1 (P Common, R Common, A Side), Thread: F [G (PF)]

Stations: 4 Stations, Piping: 1 (P Common, R Common, A Side), Thread: F [G (PF)]

Stations: 5 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]

High Vacuum Angle Valve

Material Valve size 16 25 40 50 63 80 Exterior seal r Standard AS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Special AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Valve seal 1 w Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Special B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Valve seal 2 e Standard B2401-P4V B2401

Aluminum High Vacuum Angle Valve

AS568-043V AS568-043 AS568-233V AS568-233 80 AS568-045V AS568-045 AS568-045V AS568-045 B2401-V85V B2401-V85 100 AS568-050V AS568-050 AS568-050V AS568-050 AS568-349V AS568-349 160 AS568-167V AS568-167 AS568-167V AS568-167 B2401-G155V B2401-G155 XLA XLA(V) XLC(V) XLD(V) XLH XLF(V) XLG(V) Exterior seal e Exterior seal e Valve seal w Standard Special XL XL Standard Special XLQ Standard Common

Stations: 11 Stations, Piping: P Common, R Common, A Side, Thread: F [G (PF)], Option: Mounting Adaptor, CE/UKCA Compliant: -

Stations: 11 Stations, Piping: 1 (P Common, R Common, A Side), Thread: F [G (PF)], Option: A (Mounting Adaptor)

High Vacuum Angle Valve

Material Valve size 16 25 40 50 63 80 Exterior seal r Standard AS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Special AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Valve seal 1 w Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Special B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Valve seal 2 e Standard B2401-P4V B2401

XM, XY

Material 16 25 40 50 63 80 DAS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Standard XMA XYA XMC XYC XMH XYH XMD XYD Exterior seal e AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Special XSA B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Standard Valve seal w B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Special XVD XLD40-2-

High Vacuum L Type Valve

Valve size Valve size Material 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 (3) Standard B2401-P8V B2401-P10V Special B2401-P8 B2401-P10 Note 1) Add the seal material symbol shown on page 8 at the end of the model number (in place of ).

XL-OMY0001

2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1 412 / 1 / 2 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025** AS568-030** AS568-035** AS568-039** B2401-V15V B2401-V24V B2401-P42V AS568-227V 1 B2401-V15** B2401-V24** B2401-P42** AS568-227** B2401-P4V B2401-P5V B2401-P6V B2401-P8V 2 B2401-P4** B2401-P5** B2401-P6** B2401-P8** 63 80 AS568-043V AS568-045V AS568-043

XL-OMV0002

XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043

XL-OMY0002

.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401-P42 ** AS568-227 ** S XLD40-2-9-1A XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: C (Normally Closed), Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: N (Auto Switch NPN), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)