A

23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.

Air Slide Table

Small guide 32 mm 32 mm 6 23 mm 0.6 kg Purpose of usage q Guide rigidity and a large table surface are necessary but thrust is not needed.

Air Cylinder Series MB

23 30 30 42 42 14 14 20 20 30 30 10.5 11 15 15 23 23 154 158 182 182 228 228 13 13 17 17 26 26 U CX L Z + Stroke RR ZZ + Stroke Double clevis: (D) Port CDH10 Double Clevis (mm) Bore size (mm) Stroke range H10 CX +0.3 CD +0.1 CZ L RR Z U ZZ 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 10 10 14 14 22 22 28 28 40 40 60 60 164.5 169 197 197 251 251 23 23 30 30 42 42 14 14 20

AC Servo Motor Driver (Network card type ）

PB10 Speed integral compensation] mode 2 5 23 5.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8 x 1 15.1 (Lead wire length) 39.2 [46.2] Approx. 300 Pg7 105.8 86 [88.2] 94.9 87.5 81 65 32.3 32.3 32.3 32.3 20.5 20.5 20.5 20.5 23 23 23 23 40.4 (4.9) (4.9) (4.9) 40.4 (4.9) 40.4 40.4 Note) Refer to page 340

F

16 6.0 6.0 13 4 1/4 KQT04-02S 14 10.4 10 18 26 25 16 6.0 6.0 19 6 M5x0.8 KQT06-M5 8 12.8 8 20 16 18 17 4.3 4.3 8 6 1/8 KQT06-01S 10 12.8 10 20 23 25.5 17 13.9 13.9 13 6 1/4 KQT06-02S 14 12.8 10 20 27 27.5 17 13.9 13.9 21 6 3/8 KQT06-03S 17 12.8 10 20 29 29 17 13.9 13.9 35 8 1/8 KQT08-01S 12 15.2 12 23 24.5 28 18.5 26.3 18.2 15 8 1/4 KQT08-02S 14 15.2 12 23 28.5 30 18.5 26.3 18.2 23 8 3/8

KQ2

(mm) (1) Effective area (mm2) A Mass (g) D2 L1 L2 M D1 Model Nylon Urethane 8 1 8 KQ2L04-U01 20 20.5 14 10 4 10.4 10 4.2 4.2 16 18 1 4 KQ2L04-U02 22 21.5 14 9 Applicable tubing 1 8 KQ2L06-U01 3 8 KQ2L06-U03 24 23 21.5 10 23.5 6 20 1 4 KQ2L06-U02 17 14 12.8 10 11.4 11.4 15 24.5 23 17 12 1 8 1 4 KQ2L08-U01 KQ2L08-U02 22.5 24.5 25.5 26 11 16 14 15.2 12 8 23 21.6 14.9 18.5 3 8 KQ2L08-U03 17 25.5

Made to Order

135 180 66 100 Rc 1/4 104.5 19.5 75 65 30 192 108 20 9 86 69 187 323 350 to 1000 M12 x 1.75 depth 23 M12 x 1.75 depth 23 138 160 214 76 115 Rc 3/8 119.5 20.5 90 75 35 224 128 23 8.5 104 69 201 358 350 to 1000 M14 x 2 depth 28 153 190 245 80 125 Rc 3/8 150 23 102 95 40 262 143 33 10.5 128 87 249 431 350 to 1000 M14 x 2 depth 30 153 190 245 80 125 Rc 1/2 170 23 116 114 40 262 143 37.5 10.5

LEC-OM071xx

For the units of command values set in the command area, refer 23 to 8.12.2 Specifying Units.

2/3 Port Valve

VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.

AC Servo Motor Driver

7 15 23 31 (5) Read of the statuses of output devices Read the ON/OFF statuses of the output devices.

Table of Contents

For more information, please refer to page 8-14-23.

10

Example) VX2 Z Z 1A X332 1 2 A A Electrical option Seal material: EPDM/ With bracket/Mounting holes on the bottom side of the body/ Special electrical entry direction Other option 23 Series VX21/22/23 UL-compliant Refer to the table shown below for UL-compliant. Refer to pages 21 to 23 for electrical options, other options, and bracket/electrical entry direction.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23 23 23 27 2-2.6 (For mounting) Refer to page 563 for dimensions with connector cable. 520 5 port solenoid valve Series 10

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

NCQ2/CQ2

(23) 16.5 (16.5) 19 (19) 23 (23) 63.5 (73.5) 75 (85) 73.5 (73.5) 85 (85) 43.5 (53.5) 53 (63) 53.5 (53.5) 63 (63) 75.5 (75.5) 224 Made to Order Series (N)CQ2 Symbol -XC6 Piston Rod/Retaining Ring/Rod End Nut Material: Stainless Steel High Lateral Load Water Resistant Standard Single Acting Double Rod Axial Piping End Lock Clean Series Copper/Fluorine free series Construction and Parts Suitable

5 Port Solenoid Valve Series SV1000/2000/3000/4000

SS5Y5 12S NA 05 N M U Refer to page 23 for Type 12/ Top ported dimensions. q w e r y t u Mixed Mounting Type It is possible to mount SY3000 size valves on all stations.

1

165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.

CATALOG VC10

except 53 Models 23, 33 MANIFOLD MOUNT AN CONNECTOR 1/2 NPT Model 23**, 33, 53, 73 All Models BODY OPTIONSsee page 80 FLANGE MOUNT SPLICE BOX HOUSING METERING TO ORIFICE Models 23**, 73 All Models 3.52 3.22 (81.8) .34 (8.6) Model 23, 33, 53 2.50 (63.5) (89.4) PORT 90 RIGHT JIC HOUSING METERING TO ORIFICE All Models except 53 Model 23 Model 23, 73 YOKE MISCELLANEOUS OPTIONSsee page 76 METERED