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PD11 *DI5-1 Input signal device selection 5L (CN1-7) 080Bh Refer to Any input signal can be assigned to the CN1-7 pin. The devices that can be assigned and the setting method are the same as in parameter No. PD03. the name and function field. Select the input device of the CN17 pin.

Option Nil M ZS-24-A ZS-24-B ZS-24-D ZS-35-C Fixed SI unit Note 2) Bracket A With 2 mounting screws of each M3 x 5L, M4 x 5L Bracket B With 2 mounting screws M4 x 5L With unit switching function Note 1) P (Initial value psi) Bracket D With 2 mounting screws of each M3 x 5L, M4 x 5L Panel mount adapter (Piping: For 01/N01) Panel mount adapter (Piping: For W1/WF1/M5/C4/C6) Panel mount adapter

/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics Current consumption (No load) Weight Note 3) Port size (Rc, NPT, G) Detection type Indicator light Operating pressure range

Body: 5 (Base Mounted), Valve Option: U (For Large Flow), Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Connector, w/Lead Wire)

Note 4) An appropriate range is from 3 to 5L/min. To prevent damage to the radiating system, do not supply a flow over the maximum flow rate of 8L/min.

PD03] for settings. x x _ _ For manufacturer setting 08h PD11 *DI5L Input device selection 5L Any input device can be assigned to the CN1-19 pin. _ _ x x Position control mode Device selection 03h Refer to table 5.10 in [Pr. PD03] for settings. x x _ _ Speed control mode Device selection 03h Refer to table 5.10 in [Pr. PD03] for settings.

Calculation of diaphragm life Example 1) Discharge rate 5l/min, when operating 8h/D (for PAX1000) 5 0.021 238 (cycles/min) = = Cycles per minute Discharge rate Discharge per cycle 1 60 = x x 1 8 (daily operating time) Reference life cycles Cycles per minute Service life 1 60 = 1 8 50,000,000 238 x x 437 days = Example 2) Discharge rate 5l/min, when operating 8h/D (for PA3000 automatically

VQ2140-5L-C8-A Example) A port, Plug 2-4-64 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type Manifold Option Double check block (Separated type) VQ2000-FPG- It is used on the outlet side piping.

[mm] Bar length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 4H/4L 4 6H/6L 6 8H/8L 8 AH/AL 10 5H/5L 3/16 7H/7L 1/4 9H/9L 5/16 BH/BL 3/8 : With piping on one side : With piping on both sides : Unrecommended piping Symbol High-voltage cable length [m] 1 1 2 2 3 3 The number of high-voltage cable holders differs depending on the high-voltage cable length.

Description Part number Remarks Bracket A ZS-38-A1 Mounting screw (M3 x 5L, 2 pcs.) Bracket B ZS-38-A2 Mounting screw (M3 x 5L, 2 pcs.) Bracket C ZS-38-A3 Mounting screw (M3 x 5L, 2 pcs.) Panel mount adapter ZS-27-C Mounting screw (M3 x 8L, 2 pcs.) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

To be arranged by the user. 6.3 Option L [Large capacity tank] 6.3.1 Option L [Large capacity tank] Large capacity tank provide you extra space volume for fluid collection of approximately 5L above high level.

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ VQD How to Order Valve Manifold Assembly (Example) U side VQZ2150-5L Stations VQZ2250-5L VQZ2350-5L D side VV5QZ25-05C6C1 set (C kit 5 stations manifold base) VVQZ2000-10A-51 set (Blanking plate assembly) VQZ2150-5L1 set (Single solenoid part no.)

Air operated type 2 Applicable series Symbol 03 Port size Rc 3/8 Pressure 1.0MPa 0 VBA2100/2200 VBA4100/4200 04 Rc 1/2 Related products Model Description Note VBA1110/1 VBA2100/2200 VBA4100/4200 VBA4200-04 AM250-02 AM450-04, 06 AM550-06, 10 Page 4.6-1 (Best Pneumatics No.4) Mist separator AMC310-03 AMC510-06 AMC610-10 35dB or more noise reduction Exhaust cleaner Air operated type VBAT05 (5l

Note Lead wire length: 2m With mounting screws (M3 x 5L: 2 pcs.)

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Wiring Caution M3 x 5L 1. Connection and removal of sensor connector Hold the lever and connector body with two fingers and insert the connector straight into the pin until it is locked with a click sound.

Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

VF VFR How to Order Valve Manifold Assembly (Example) VP7 VP4 VQZ2150-5L VQZ2250-5L VQ U side 2 3 4 5 VQZ2350-5L VQ4 VV5QZ2505C6C1 set (C kit 5 stations manifold base) VVQZ200010A-51 set (Blank plate assembly) VQZ21505L 1 set (Valve P/N single solenoid) VQZ22505L 2 set (Valve P/N double solenoid) VQZ23505L 1 set (Valve P/N 3 position) VQZ D side 1 VQD VZS Prefix mark to valves etc. to

.) *4 Fixed unit: Instantaneous flow: L/min Accumulated flow: L XY 2 outputs (NPN/PNP switching type) + Copy function Sensor connector C *1 Can switch between 1 to 5 V and 0 to 10 V *2 Can be switched to external input or copy function Option 1 Option 2 Symbol Description Nil Without lead wire Symbol Description Nil None ZS-46-5L ZS-46-A1 A1 Bracket A (Vertical mounting) L Power supply/