High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

5

01 03 50 12 Part no.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

VFS

04 03 04 q Description No.

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

Table of Contents

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

5 Port Solenoid Valve

1 e VV5QC 5 1 12 SDQ 03 S Kit VQC5000 series y i o !

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

04 03 04 No.

Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

0.4

Lead wire is not included. kit (R1)51 (P) 3(R2) (R1)51 (P) 3(R2) When ordering with manifolds When only valves are required.

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

Air Cylinder Series CM2

Rod Side Trunnion Head Side Trunnion TX Z + Stroke TX CD Z + Stroke CD 3.2 40 51 51 40 3.2 6.8 20.5 7.5 40 57 6.8 x 3.4 6.8 20.5 LX LZ LX LZ 7.5 40 57 6.8 x 3.4 (mm) Head side trunnion Z + Stroke 108 112 114 143.5 Mounting Part no.

Stainless Steel 316 Fittings

KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 19.4 23.8 19.4 23.8 20.9

Fluoropolymer Piping Equipment

25 8 5.5 LQ1E61-R5 25 6 15 15 51 42 16.5 3.6 (E1) C1 Note) Products marked are produced upon receipt of order.

AC Servo Motor Driver (Pulse input type/Positioning type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

0.4

Refer to page 51 for mounting method.

4/5 Port Solenoid Valve

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2005 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing IO printing JP 120DN Printed in Japan.

Valve Single Unit

Manifold block assembly q (Metric size) SX5000-51-2A (Inch size) SX5000-51-16A R, P port SX3000 (Metric size): With One-touch fittings for 8 (Inch size): With One-touch fittings for 5/16" R, P port SX5000 (Metric size): With One-touch fittings for 10 (Inch size): With One-touch fittings for 3/18" SUP/EXH block assembly (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A w End block assembly

2/3 Port Valve

VX3324-03 VX3234-03 VX3334-03 VX3244-03 VX3344-03 6 0.33 0.5 4 9 0.19 2.2 3.4 3 8 0.33 3 6 (10A) Option Material 0.5 4 9 No.