Model: 5 (VP500), Pilot: Internal Pilot, Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Switch Electrical Entry: S1 (M12 Connector, Rockwell Automation), Check Valve, External Pilot Only: None

Model: 5 (VP500), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: N (NPT), Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: B (Applicable Tube O.D. ø1/4")

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool

Model: VP500, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Switch Electrical Entry: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: Applicable Tube O.D. ø1/4"

Model: VP500, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Switch Electrical Entry: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: None

Model: VP500, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: NPT, Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: Applicable Tube O.D. ø1/4"

2

Applicable model KQ06-P01N KQ2E05-00MN, KQ2E07-00MN KQ2E05-01N, KQ2E07-02N KQ08-P01N KQ2E09-00MN, KQ2E09-03N KQ10-P01N KQ2E11-00MN, KQ2E11-03N Pipe nut KQ12-P01N KQ2E13-00MN KQ2E13-03N, KQ2E13-04N 381 Fittings KQ2 KDM6 KDM INDEX 382 Metric Size One-touch Fittings Applicable Tubing: Metric Size, Connection Thread: G Series KQ2 Chuck Guide Release button Requires little force for removal.

One-touch Fittings

Applicable model KQ06-P01N KQ2E05-00MN, KQ2E07-00MN KQ2E05-01N, KQ2E07-02N KQ08-P01N KQ2E09-00MN, KQ2E09-03N KQ10-P01N KQ2E11-00MN, KQ2E11-03N Pipe nut KQ12-P01N KQ2E13-00MN KQ2E13-03N, KQ2E13-04N 163 A Round Type Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni Sealant/Gasket Seal Face Seal

5 Port Solenoid Valve Series SV1000/2000/3000/4000

A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M Symbol F1 H J1 J2 Q R1 R2 V ZB ZBN Protocol type SI unit part no.

Series SV

SV3000-50-1AFor single SV3000 SV3000-50-2AFor double C8: With 8 One-touch fitting N9: 5/16" One-touch fitting C10: With 10 One-touch fitting N11: 3/8" One-touch fitting C12: With 12 One-touch fitting 02: Rc 1/4 02N: NPT 1/4 03: Rc 3/8 03N: NPT 3/8 02F: G 1/4 02T: NPTF 1/4 03F: G 3/8 03T: NPTF 3/8 (Tie-rod for station additions and gaskets , , and are included.)

Vacuum System Peripherals:

Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications Port size Solenoid valve VT301(V) VT315(V) VT325(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744

3 Port Air Operated Valve

Note VP544 VP344 VP744 VP 3 1 202 00 8 Gasket HNBR VP500-217-1 VP300-217-1 VP700-217-1 VP500-202VP300-202VP700-2029 Sub-plate Aluminum die-casted Hexagon socket head bolt (1 pc.)

SV

SV4000 Rc 3/8 G 3/8 A, B ports mixed A, B port size (Inch) P, E port Applicable series Specifications Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M One-touch fitting for 1/8" One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" One-touch fitting for 1/4" One-touch fitting for 5/16" One-touch

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 1) Note 2) A, B port size (Metric) A, B port size (Inch) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch

Model: 7 (VP700), Pilot: Internal Pilot, Valve Electrical Entry: Y (DIN Terminal w/Connector, w/Pitch 8mm Standard), Port: 04 (1/2, VP700), Thread: N (NPT), Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: None

Model: 7 (VP700), Pilot: Internal Pilot, Valve Electrical Entry: Y (DIN Terminal w/Connector, w/Pitch 8mm Standard), Port: 04 (1/2, VP700), Thread: F (G), Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: None

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: NPT, Port Size: 1/2, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool