2

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Electric Actuator/Slider Type

Nil Without connector H With connector Compatible drivers Power supply voltage (V) Size 25 32 40 Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 Applicable stroke table Standard C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 Model Stroke (mm) 100 200 300 400 500 600 700 800 900 1000 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to

Environment

230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 LEC !

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

ZX

Without connector None Nil G H Nil Grommet type Lead wire length 0.3 m (Applicable to DC only) Lead wire length 0.6 m (Applicable to DC only) Air operated Z With light/surge voltage suppressor S With surge voltage suppressor In the case of AC, S is not available. Note) In the case of K1 or J1 (combination of supply and release valves), M type plug connector can not be used.

LJ1H

panel,s protective earth (PE).

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

panel,s protective earth (PE).

Step Motor Controller

to the control panel,s protective earth (PE).

Programless Controller Series LECP1

to the control panel,s protective earth (PE).

Title not found

to the control panel,s protective earth (PE).

LG1H

panel,s protective earth (PE).

ITV

, Hyteresis Repeatability With 50% of signal input 1 0.8 1 Output deviation factor (% F .S.)

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

CRB2/CRBU2/CRB1

CRBU2W-SE Free-Mounting Type CRBU2 CRB2 CRBU2W10-SE CRBU2W10-S CRB1 (mm) (depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) 10.5 10.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 0.004 0.012

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRBU2W10-SE CRBU2W10-S A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 10.5 8.5 10.5 11 11.5 14 12 15.5

Table of Contents

CRBU2W10-SE CRBU2W10-S A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 10.5 8.5 10.5 11 11.5 14 12 15.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRBU2W10-SE CRBU2W10-S A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 10.5 8.5 10.5 11 11.5 14 12 15.5

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2

0.4

AXT100-1-P Note 3) U S U S U S w U S AXT100-1-J 20 Note 3) U S AXT100-1-F Note 3) e r AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.