Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

3

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

High Pressure Coolant Valve

50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Process Valve

External pilot solenoid Air operated Pilot Solenoid Valve Specifications Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ-Q Pilot solenoid valve SF4--23 SF4D DZ-23-Q Symbol Grommet, Grommet terminal Conduit terminal DIN terminal Grommet, DIN terminal VNA VNA Valve type Type N.C. N.O. C.O.

Compact

q Check the actuator label for model number.

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

HRX-OM-Q026

(English 1, Japanese 1), Operation Manual 2 copies (English 1, Japanese 1), Accessories Y strainer (40 mesh) 25A, Barrel nipple 25A, Anchor bracket 2 pcs.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 2 2 3 1 2 3 2 3 4 B B C A B C B C D 6 x 4 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 1/4" x 5/32" 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 12 x 10 1/2" x 3/8" 19 x 16 3/4" x 5/8" 25 x 22 1" x 7/8" Dimensions Union Flange: LQ3F Metric Size (S) T P M L2 L2 L1 L1

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

VNB

indicator light: DL) Main port Rc A B C D E F G H I J K L M N P Q R S T U V W Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 75 87 97 114 126.5 170.5 173.5 180.5 52 26 4.5 24.3 2.3 25 34 55 80 90 50 60 35 40 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 141.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 17-

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!