smcmaintenancepartslist

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

This is a legacy product, and replaced byVFR5310-5DZ-04F-Q, Type of actuationModelPort sizeFlow characteristics (1)Max. (2)operating cycle(Hz)Response (3) time (ms)(4)(kg) Plug-inNon plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?bar)]bCvC [dm3/(s?bar)]bCv3 positionClosed centerVFR530VFR5313/8150.384.1160.314.3380 or less1.87(1.82)

This is a legacy product, and replaced byVT317-5DZ-02F-Q

This is a legacy product, and replaced byVFS5110-5DZ-04F-Q

This is a legacy product, and replaced byVFS4210-5DZ-Q

This is a legacy product, and replaced byVFS5110-5DZ-Q

This is a legacy product, and replaced byAV3000-F03-5DZ-Q AV SOFT START UP BODY PORT. VALVE, SOFT START 3/8. VALVE. AV BODY PORT 3/8 NPT. 1.15242 lb. GA.

This is a legacy product, and replaced byVFS6110-5DZ-Q VFS6000 SOL VALVE 4/5 PORT. VALVE, SOL. VALVE. VFS6000. 7.75336 lb. 2D.

This is a legacy product, and replaced byVK334-5DZ-01-Q VK300 SOL VALVE 3-PORT. VALVE, SGL SOL, BASE MT. VALVE. VK300 BASE MT 1/8. .64059 lb. NA.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Compact Manifold Regulator Series ARM5

1 q SMC o A Component Parts Description Replacement Parts Material Part no. Note Material No. Description No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

Size: 7 [ø50(ø33)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: A (NBR Seal), Body Material: Standard, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 50A (2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, X200: X200