Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

Coolant Valve

Description VNC1 -6A, 8A, 10A VNC2 -10A, 15A VNC3 -20A VNC4 -25A VNC5 -32A, 32F VNC6 -40A, 40F VNC7 -50A, 50F No.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-11 pc. (Blanking plate) VV3Z4-50-061-01 (6 stations) VZ415-1G3 pcs. VZ425-1G2 pcs. VVZ400-32A-21 pc.

E-P HYREG ® Series VY1 1

Bracket (Option) VEX7-32A Hexagon socket head cap screw M6 =10 (4 pcs.)

E-P HYREG ® Series VY1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G36-10-01 G46-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

5-Port Solenoid Valve

B B Connector Connecting Base C Individual SUP (EXH) spacer assembly C D-sub, Flat Ribbon A Valve Terminal Block q: SY3000-23-32A w: SY5000-221-3A e: SY7000-221-3A Lead Wire Individual SUP (EXH) spacer assembly A SY300023-32A (2 pcs.) SY5000221-3A (2 pcs.) SY7000221-3A (3 pcs.)

E-P HYREG

Description 0 1 0 1 VY110 0 1 VY120 0 1 VY130 0 1 0 1 0 1 VY140 VY170 0 1 VY190 0 1 VY1D00 VY150 VY1B0 VY1A0 ITV B F G N AN120-M5 VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) IC VEXA-18-3A VEX1-18-2A G27-10-01 AN120-M5 G36-10-01 AN101-01 AN120-M5 G46-10-01 AN210-02 G27-10-R1-X207 Pressure gauge ITVH Pilot EXH port silencer ITVX Sub-plate and Base Gasket

70pvvna

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

FKM Water Bronze Conduit EPDM Oil Aluminum JSXD70 Series 1 1/4, 32A 35 M12 connector 1000 Refer to pages 47 to 50 for details.

Process Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.



VEX5-32A VEX7-32A VEX9-32A VEX1-18-2A VEX1-18-2A F Foot (With bolt and washer) G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 G Pressure gauge AN120-M5 N Silencer for breed port (PE) The optional parts are shipped in the same package.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-37-15A CE-compliant 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Nil Q CE-compliant SY3000-37-34A A, B port size SY3000-37-32A Note) CE-compliant: For DC only.

3 Port Air Operated Valve Series SYJA300 1

VVZ200-32A-11 pc. VVZ400-32A-11 pc. Caution Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.

SYJ3000/5000/7000

spacer SY3000-37-4A Interface regulator for single solenoid SY3000-37-3A 1 3 2 4 For DC: SYJ5 5 LO Z Double solenoid, 3 position interface regulator SY3000-37-6A 3 port adaptor plate SY3000-37-3A SYJ5 1 LOZ 1 3 2 4 For AC: 100 VAC Single solenoid SY3000-37-46A Type of actuation Double solenoid, 3 position type SY3000-37-47A 1 2 3 4 5 Single solenoid, individual SUP, EXH spacer SY3000-37-32A

Table of Contents

VS4 VQ7 Throttle valve spacer AXT510-32A Double check spacer VV72-FPG EVS VFN Throttle valve spacer (AXT510-32A) Double check spacer VV72-FPG SMC SMC 222.5(192) 205 243(212.5) 225.5 210.5(180) 193 231(200.5) 213.5 RIEA 140(109.5) 122.5 S L O W 119.5(89) 102 PA 80.5(50) 63 B PE PE PA 80.5(50) 63 B P PE PE P R1 R2 R1 R2 EA EB EB EA A A Dimensions inside ( ) are for sub-plate aperture Rc 3/8

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

VQ7-6/7-8

By mounting individual supply spacers on a manifold block, supply ports can be provided individually for each valve. 1 2 4 14 5 1 3 12 1' 5 3 Individual EXH spacer Throttle valve spacer 03 04 VV72-RAXT510-32A By mounting individual exhaust spacers on a manifold block, exhaust ports can be provided individually for each valve. (3, 5 common exhaust type) By mounting a throttle valve spacer

1

C C D Individual EXH (SUP) spacer assembly D A Valve q: SY3000-23-32A w: SY5000-221-7A e: SY7000-221-7A A SY300023-32A (2 pcs.) SY5000221-7A (2 pcs.) SY7000221-7A (3 pcs.) Interface regulator B B C Individual SUP (EXH) spacer assembly C Mounting onto a manifold follows the order explained above.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

single solenoid: SY3000-37-3A Double solenoid, 3 position type SY3000-37-4A Station 12 Station 4 Station 3 Station 2 Station 1 Coil SY5000-37-4A Single with spacer assembly SY5000-37-3A SY5000-37-5A Double, 3 position with spacer assembly SY3000-37-6A SY5000-37-6A Triangle mark position For 100 VAC Note) Connector Specifications For SY3000 For SY5000/7000 For single solenoid: SY3000-37-32A

Power Valve Precision Regulator

Description 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A F VEX1-18-2A VEX1-18-2A Foot (With bolt and washer) G G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 Pressure gauge (3) N AN120-M5 Silencer for bleed port (PE) Note 1) Not conforming to ISO1179-1.