Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference Range

Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference Range

Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference Range

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Standard, Pilot System Option: Standard, Thread: NPT, Port Size: 1/2, Voltage: 12VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliance: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Standard, Pilot System Option: Standard, Thread: NPT, Port Size: 1/2, Voltage: 100VAC 50/60HZ, Lead Wire: Grommet w/Surge Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliance: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Standard, Pilot System Option: Standard, Thread: NPT, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Grommet Terminal, Manual Override: -, Bracket: -, X200: -, CE Compliance: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Standard, Pilot System Option: Standard, Thread: NPT, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Conduit Terminal, Manual Override: -, Bracket: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Standard, Pilot System Option: Standard, Thread: NPT, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Standard, Pilot System Option: Standard, Thread: NPT, Port Size: 1/2, Voltage: 110VAC 50/60HZ, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 3 8 Option VV5FS4-10-061-03-A VFS4110-5D 1 4 The asterisk denotes the symbol for assembly.

VFR

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Free Mount Cylinder

Note 1) In the case of ZCUKR16-5D: 14.5 mm.

Hydraulic

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l 5D (M) CHQB63 10D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105

Compact Hydraulic Cylinder

(M) x 95L 95 x 135L 135 -50D (M) -75D (M) x 100L 100 x 160L 160 CHQ CHmQB32-5D (M) -100D (M) CHmQB80-10D (M) M5 x 70L 70 x 185L 185 -10D (M) M10 x 100L x 75L 75 100 CHKm -15D (M) -15D (M) x 80L 80 105 x 105L -20D (M) -20D (M) x 85L 85 110 x 110L CHN -25D (M) -25D (M) x 90L 90 115 x 115L -30D (M) -30D (M) x 95L 95 120 x 120L CHM 7 -35D (M) -35D (M) x 100L 100 14.5 125 x 125L CHSm -40D (M)