0.4

Note 2) Specify wiring type of each station on the manifold In the case of the 16-output SI unit Symbol 01 Stations Note 1 station specification sheet. Double wiring Note 1) 08 01 8 stations 1 station Specified layout Note 2) (Available up to 16 solenoids) Note 1) Indicate the sizes on the manifold specification sheet in the case of CM.

Base Mounted Metal Seal/Rubber Seal Series VQ

Note 1) 1 station 01 16 stations Note) Number of terminals 16 Note 2) Refer to page 2-4216 for details.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-08 AS2200-01 SV 200 SYJ 100 70% 50% 30% 10% SZ 0 400 MB 40 VP4 300 AS2201F -02-08 AS2200-02 S0700 200 VQ 100 VQ4 0 SV200 ANA1 -C10 T0806 VQ5 400 MB 50 300 VQC AS3201F -02-08 AS3000-02 200 VQZ 100 SQ 0 VFS MB 63 400 VFR 300 VQ7 AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components

0.4

F Manifold mounting AXT100 03 kit Nil E DIN rail mounting style Direct mounting style Wiring Stations Note) Note) S D Single wiring Double wiring SSQ2000 PR 3 C10 01 For 1 station P PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09 (P kit, 20P) JL20: 01 to 08 (J kit, 20P) Port size kit 24 For 12 stations Option C8 C10 N9 N11 One-touch fitting for 8 One-touch fitting

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

Speed Controller with One-touch Fitting

-23(S)A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2

SQ1000/2000

rail mount type Direct mount type Nil E Wiring Stations Note) S D Single wiring Double wiring SSQ2000 PR 4 C10 Note) PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09 (P kit, 20P) JL20: 01 to 08 (J kit, 20P) 01 1 station Bore size Option 12 12 stations C8 C10 N9 N11 8 One-touch fitting 10 One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting

KR

(mm) Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

Flow Control Equipment

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

Series KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Specifications Thread connection Tubing (rod) connection 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel (SUS304) Plug Same dia. tubing 4 Different dia. tubing

Series KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Specifications Thread connection Tubing (rod) connection 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel (SUS304) Plug Same dia. tubing 4 Different dia. tubing

KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Thread connection Tubing (rod) connection Specifications 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel (SUS304) Plug Same dia. tubing Different dia. tubing (plug-in

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Q 01 Applicable fitting size Port size/Applicable tubing O.D. 04 06 08 10 12 Clean One-touch fitting 4 6 8 10 12 M5 M5 x 0.8 Specifications Thread connection Tubing (rod) connection 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Symbol Q G Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel (SUS304) Plug Same dia. tubing 4 Different dia. tubing

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Double wiring Note 1) P R : 08 03 R port 1/8 Specified layout Note 2) : P port 1/8 (Up to 16 solenoids) 16 A, B port size Clean series Type 42SA (5 port/Base mounted) How to Order 01 1/8 10 03 SS5YJ5 42SA 01 SI unit NPN output (+ COM.) Nil N CE-compliant A B PNP output ( COM.)

KQ2

P. 71 63 Series KQ2 Male Connector: KQ2H Note) 01-32 KQ2H03-32 07-32 H Connection thread UNF NPT 01-32 KQ2H03-32 07-32 Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

SY

1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AK AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 VCHC Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG