SYJ3000/5000/7000

189 18 207.5 199.5 19 218 210 1-5-23 24 Series SYJ3000 Flat Ribbon Cable Manifold [ ]: AC SS5YJ3-21PStations -00 L1 L2 4 Manual override + + + M3 x 0.5 (A, B port) + 10 2 2 5.2 111.5 [115.9] 17.3 30 17 7.5 7 8.5 3 98.6[103] B A B A B A B A B A B A 16 R P R P 29.2 31.5 61.3 [63.5] 62.1 [64.3] 45.5 65.3 2-4.5 (For mounting) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

A b . A b . A PLCetc Axis Axis Axis No. 1 No. 2 No. 3 "b01" is displayed on axis No. 1, "Ab." is displayed on axis No. 2 and later. PC or PLCetc Controller After PC or PLCetc reset 0 1 b b . A b . A One axis is connected per reset.

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

31.5 20 Stations 228.5 220.5 513 10-SYJ3000 Manifold specifications Flat ribbon cable manifold [ ]: AC 10-SS5YJ3-21PStations -00 L1 L2 4 Manual override + + + M3 x 0.5 (A, B port) + 10 2 2 5.2 111.5[115.9] 17.3 30 17 7.5 7 8.5 3 98.6[103] B A B A B A B A B A B A 16 R P R P 29.2 31.5 61.3[63.5] 62.1[64.3] 45.5 65.3 2-4.5 (For mounting) + + + + + + Triangle mark (Pitch) P=12.5 1/8 (P, R port

High Purity Chemical Valve

LVC B A B A B A PB Double acting N.C. N.O. Double acting LVA With flow rate adjustment PA PA N.C. B A PB B A Double acting LVH N.C. Double acting With bypass PA PA N.C. LVD PB B A B A Double acting N.C. Double acting With flow rate adjustment & bypass LVQ PA PA N.C. PB B A B A Double acting N.C. Double acting LQ1 With indicator PA N.C. B A LVN N.C.

AC Servo Motor Driver (CC-Link Type ）

to [F], [b] to [f]).

V100

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

AC Servo Motor Driver (CC-Link Type ）

to [F], [b] to [f]).

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Prevents Micro-Bubbles

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

Vacuum Ejector Series ZM

-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure range Hysteresis Repeatability Diaphragm Solid state Electronic circuit Solid state Reed 27 to 80 kPa 0 to 101 kPa Max. 15 kPa Max. 20 kPa 3% full span or less (Fixed) 1 to 10% of the set pressure (Changeable) 1 to 10% of the set pressure (Changeable) 1% full span

CG5-S

(mm) Model Model a 4 6 8 10 b 6 8 10 12 2a 4 6 8 10 12 16 KGL04-00 KGT04-06 KGL06-00 KGT06-08 KGL08-00 KGT08-10 KGL10-00 KGT10-12 KGL12-00 Different Dia. Union "Y" KGU KGL16-00 Applicable tubing O.D. (mm) 2a Union Tee KGT Model a 4 6 8 10 b 6 8 10 12 Applicable tubing O.D. (mm) KGU04-06 Model KGU06-08 4 6 8 10 12 16 KGU08-10 KGT04-00 KGU10-12 KGT06-00 KGT08-00 b KGT10-00 Different Dia.

AC Servo Motor Driver

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 12 26 12.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Direct Operated

Passage symbol (example) Passage symbol (example) 2 2 2 2 1 1 3 3 Passage: 1 2 Passage: 2 3 Operating pressure (MPa) Flow characteristics Max. system pressure (MPa) 3 1.5 Orifice diameter (mm) Model C[dm3/ (sbar)] Port 3 side Port 1 side Port 1 side C[dm3/ (sbar)] 0.08 0.20 b Cv Port 3 side b Cv VXV3131-00 VXV3133-00 VXV3241-00 VXV3341-00 VXV3243-00 VXV3343-00 0.29 0.82 0.32 0.20 0.20 0.08

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

B B B B (4.4) 32 15.3 7.5 17 16 A A A A A 1 (Station n) (Station 1) L1 L2 (Pitch) P = 10.5 4.5 (Light/surge voltage suppressor) 15.5 15.5 (Station n) (Station 1) + + (Light/surge voltage suppressor) A A 20 48.5 [55.5] 15 5 B B + + 16 1.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 33.1 A A 20 15 B B 1 (Pitch) P = 10.5 5 M5 x 0.8 (A, B port) 16.5 L plug

90

C D J K P L W (without supply/release valve, without switch, pressure sensor) KJR KJRN L to L3 C to L3 06 P 560 56 P to J N 00 i Optional Specifications/Functions/Applications Note 19) Q 08 Type Function/Application Symbol Nil L to N A 07 ZK2 07 Without option B 10 09 Bracket P to N C to N With one bracket for mounting a single unit (Mounting screw is attached.)

Vacuum Unit Ejector / Vacuum Pump System

Refer to Fig.1) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.