2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

AK3542 & 4542 Body material: 316 SS Normally closed RoHS How to Order (Inlet) (Outlet) 3 4T 4T AK 542 S2P Size Seat material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N

Series AK1000

AK3542 & 4542 Body material: 316 SS Normally closed RoHS How to Order (Inlet) (Outlet) 3 4T 4T AK 542 S2P Size Seat material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N

Directional Control Driver for Electric Cylinder

VHR-4N: J.S.T. Mfg Co., Ltd.) VHR-2N: J.S.T. Mfg Co., Ltd.) BVH-21T-P1.1: J.S.T. Mfg Co., Ltd.) Caution Do not apply repetitive bending or pulling stress to the cable. Wiring with repetitive bending or pullling stress to the cable will likely cause the cable to break.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

switch With auto switch Bore size (mm) Stroke range (mm) L1 L CZ CX CW CU CT CD A B CL A 60 70 68.5 78.5 80.5 90.5 B 23 33 29.5 39.5 30.5 40.5 CL 50 60 58.5 68.5 66.5 76.5 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 Rod end nut 32 Rod end male thread 7 36 18 20 14 5 10 28.5 70 33 60 40 7 36 18 22 14 6 10 28.5 78.5 39.5 68.5 Double clevis style: CQ2D/CPQ2D 50 8 44 22 28 20 7 14 33.5 4N

5 Port Air Operated Valve Series SYA3000/5000/7000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4n-Rc 1/2, 3/4 Port size (Rc 3/4, 1) ( ) for VVPA460 Individual EXH: VVPA450Station 2Port size VVPA460Station 2Port size 2-Rc 3/4 Port size (Rc 1) 2-Rc 1/8 2-Rc 1/8 Pilot port Pilot port Mounting hole Rc 1/8 Pilot port 4n-Rc 1/2, 3/4 2n-Rc 3/4 Port size

VPA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4n-Rc 1/2, 3/4 Port size (Rc 3/4, 1) ( ) for VVPA460 Individual EXH: VVPA450Station 2Port size VVPA460Station 2Port size 2-Rc 3/4 Port size (Rc 1) 2-Rc 1/8 2-Rc 1/8 Pilot port Pilot port Mounting hole Rc 1/8 Pilot port 4n-Rc 1/2, 3/4 2n-Rc 3/4 Port size

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ1F4: LQ-4N LQ1F5: LQ-5N Different diameter tubing order example Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Union elbow Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A B Only select combinations from the same body class.

IIIIIII

T.T 90" .75 PSIG (5 Kgf/cm2) #4n 2V,,tay 3 Way F O F , 3 31 lbs. (1.5 kg ) T T 45" A B c D E F G H J K tl N 3.44 '473' 2.24 '56.81 1.25 31.8) 1.20 0.06 (1.5) 0.12 (3) 0.86 t22.51 1.57 {rto) t.42 361 1.26 (321 1.20 0.24 (6) Millimeters in Parenlheses Millimelrs in Parenthses MECHANICAL VALVES HOWTO ORDER DIMENSIONS Series NVM HOW TO ORDER NVM 220 N02 065 TT t l I LRoller Material (01,02,06,07

Size: 3 (0.29 Cv), Inlet Connection: 4N (NPT 1/4 Male), Outlet Connection: 4N (NPT 1/4 Male)

Size: 3 (0.29 Cv), Inlet Connection: 4N (NPT 1/4 Male), Outlet Connection: 4N (NPT 1/4 Male)

LC-OM089xx

LC3F212-5[][]A) Contact BVH-21T-P1.1 12 Directional control equipment 1 Operation manual (This document) 1 Cross recessed bind screw M3 4 1 Spring seat Nominal3 1 ground terminal Tooth lock washer (A) Nominal 3 1 Housing VHR-2N 1 Housing VHR-3N 1 Housing VHR-4N 1 Ensure parts below are included in the package. Disposal Dispose as general industrial waste. 2.

Mechanical Valves Series NVM, NVFM, NVZNI

T.T 90" .75 PSIG (5 Kgf/cm2) #4n 2V,,tay 3 Way F O F , 3 31 lbs. (1.5 kg ) T T 45" A B c D E F G H J K tl N 3.44 '473' 2.24 '56.81 1.25 31.8) 1.20 0.06 (1.5) 0.12 (3) 0.86 t22.51 1.57 {rto) t.42 361 1.26 (321 1.20 0.24 (6) Millimeters in Parenlheses Millimelrs in Parenthses MECHANICAL VALVES HOWTO ORDER DIMENSIONS Series NVM HOW TO ORDER NVM 220 N02 065 TT t l I LRoller Material (01,02,06,07

Fluoropolymer Piping Equipment

LQ1F4: LQ-4N LQ1F5: LQ-5N Note 4) Combinations will differ depending on the type of each fitting. For the availability of combinations, refer to pages 885 to 888. Note 5) For details of the applicable tubing sizes, refer to page 945.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

To order valves and options mounted onto the manifold at the factory, list the valve/option with an asterisk () in front of each part number. 1782 Series VPA450 5 Port Air Operated Valve Dimensions Common EXH: VVPA450Station 1Port size VVPA460Station 1Port size 34 6 x Port size (1) 18 18 2 x 2 x Pilot port Pilot port 4 x 13 Mounting hole 18 Pilot port 12 34 4n x , Port size (3/4, 1) ( ) for

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

switch With auto switch Bore size (mm) Stroke range (mm) L1 L CZ CX CW CU CT CD A B CL A 60 70 68.5 78.5 80.5 90.5 B 23 33 29.5 39.5 30.5 40.5 CL 50 60 58.5 68.5 66.5 76.5 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 Rod end nut 32 Rod end male thread 7 36 18 20 14 5 10 28.5 70 33 60 40 7 36 18 22 14 6 10 28.5 78.5 39.5 68.5 Double clevis style: CQ2D/CPQ2D 50 8 44 22 28 20 7 14 33.5 4N

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, "VALVE, MECHANICAL VALVE

HRX-OM-Z002

Table 3-4 Communication cable and terminal block (Recommended) Terminal specifications Cable specifications Terminal block screw diameter Recommended crimp terminal M4 Y-shape crimped terminal 0.3mm2(AWG22) 0.3Y-4N Shielded cable Table 3-5 Pin numbers PIN No.

JXCx-OMU0004

CN1 5.1 (LEC-CK1-1) 6.0 (15.8) (60) (35) (L) (13.3) (10.5) VHR-4N AWG20 L LEC-CK1-11.5m M24V /C24V / BK RLS 0V M24V + + C24V + + + BK RLS + M24V 5.2 1(4)DC24V CN1 (1) C24V M24V DC24V OV 0V 0V M24V 24V C24V BK RLS DC24V 17 No.JXC-OMU0004-A (2) *DC24V0.5A DC24V BK RLS 0V 0V M24V 24V C24V BK RLS BK RLS BK RLS DC24V STOP CN4 14pin STOPONOFF C24V (3) M24V STOP CN4