MU

BS + Stroke (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 BT Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5

MU

BS + Stroke (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 BT Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5

Dedicated Controller

LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

Dedicated Controller

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LTF (Incremental encoder) H Applicable actuators Compatible actuator models LTF6ELTF8FLTF6E-K LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller

Body Size: 50, Thread: G, Port Size: 1, Handle/Bonnet Material: Aluminum, Options: None, Semi-Standard: None, Made to Order: Body: Red

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: G1, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: G1, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Reverse Flow (Right to Left)] Right to left, Drain Cock: [Not Provided] No, Pressure Gauge: -,

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: G1, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No

Body Size: 50, Thread: F (G), Port Size: 10 (1), Handle/Bonnet Material: B (Aluminum), Options: B (w/Bracket)

Body Size: 50, Thread: F (G), Port Size: 10 (1), Handle/Bonnet Material: B (Aluminum), Options: S (Built-in Silencer, EXH Port)

Body Size: 50, Thread: F (G), Port Size: 10 (1), Handle/Bonnet Material: B (Aluminum), Options: None, Semi-Standard: R (Flow Direction: Right to Left)

Body Size: 50, Thread: F (G), Port Size: 10 (1), Handle/Bonnet Material: B (Aluminum), Options: None, Semi-Standard: None, Made to Order: X1 (Body: Red)

Slider Type/Ball Bushing Bearing

With shock absorber (1 pc. on port side) TN TF 20, 25, 32 BS The adjusting bolt is installed even when B or BS is selected.(Except 10) Standard stroke (mm) Refer to Standard Stroke on page 1529.

MU

Relay, PLC Diagnostic indicator ( 2 color) 24V Yes J79W F7BWV 2 wire 12V Rod end male thread M Water resistant (2 color) F7BA Grommet 3 wire (NPN) With timer F7NT 5V 12V IC With diagnostic output (2 color) Latch with diagnostic output (2 color) F79F 4wire (NPN) F7LF 0.5m (Example) 3mL A80C A80CL A80CZ A80CN 5mZ (Example) N Lead wire length Solid state switches marked with a K

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

Secondary Batteries

Note 2) Assembly of a bracket and set nuts (90-AR30 and 90-AR40, 90-AR25(K) to 90-AR40(K)) Including 2 mounting screws for the 90-AR50(K) and 90-AR60(K). Note 3) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. Note 4) : For thread type: NPT.

SZ3000

SD RD 24 V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24 V 0 V 24 V 0 V +24V 24G DA DB DG FG Description Description Description LED LED LED PWR. Light ON with transmission power input, light Off without it Green light ON with circuit power input PWR.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Back pressure check valve A 4 (A) 4 (B) 2 Built-in Nil K None A 2 B SOL.b SOL.a 3 (R) 5 (R) 1 (P) Pilot specifications 4 position dual 3 port valve: N.O./N.O. External pilot Nil R Internal pilot (A) 4 (B) 2 B Dual 3 port valves are not available with external pilot specifications. SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

Air Pilot Operated Series NVSA

\ LLrJ \ F".k t t t I * DI"ENSIONS DIRECTIOI{AL AIR YALVE SUBPLATES SERIES NVSA 4)24 GLn.I'l; Sub.pletes ar3 heavy duty aluminum dl castings.