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DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Free Mount Cylinder

, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Model ASV310F/410F/510F Applicable tubing O.D. d (Hexagon width across flats) Metric Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Model ASV310F/410F/510F Applicable tubing O.D. d (Hexagon width across flats) Metric Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

Modular Design with Uniform Body Style

-1-D Y510-m03-1-D Y610-m03-1-D Y610-m04-1-D Y54-m02-D Y54-m03-D Y54-m04-D Y54-m06-D Y34-m01-D Y34-m02-D Y34-m03-D Y44-m02-D Y44-m03-D Y44-m04-D Y64-m03-D Y64-m04-D Y64-m06-D Attachment Standard Y24-m01-D Y24-m02-D Cross spacer*5, *6 p. 53 Y34-m01-1-D Y34-m02-1-D Y34-m03-1-D Y44-m02-1-D Y44-m03-1-D Y44-m04-1-D Y54-m03-1-D Y54-m04-1-D Y54-m06-1-D Front and Y24-m01-1-D Y24-m02-1-D back port

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

1

only 30 d 30 d (D) (C) (D) (C) H B H B Part no.

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Dual Speed Controller with One-touch Fitting Series ASD 1

-07S 48.7 25.6 13.2 93 20.3 18.5 5/16" ASD530F-N03-09S 51.3 28.2 46.9 NPT 3/8 35.3 19 19.8 23 15.2 14 41.9 46.5 41.5 40.3 3/8" ASD530F-N03-11S 102 54.1 64.3 23.1 25.9 21 32.6 18.5 42.1 26.5 28.6 3/8" ASD630F-N04-11S 180 18.6 57.6 50.1 NPT 1/2 49.6 23.8 64.8 57.3 Reference dimensions of U10/32 and NPT threads after installation. 15-9-17 5 Series ASD Construction ASD530F-02 ASD230F ASD330F

ASP

Applicable tubing O.D. d L2 L3 M AQ ASV AK D2 L1 VCHC ASS T2 L4 H1 ASR ASQ (Hexagon width across flats) H2 KE (Hexagon width across flats) TMH D3 A1 L5 D1 A2 T1 Inch Size L4 (1) Mass (g) A1 (2) A2 (2) D3 L3 L2 L1 M d T1 D1 H1 H2 D2 Max. Min.

Table of Contents

D-C73/D-C76/D-C80 Band Mounting Style. D-B53/D-B54/D-B64 Band Mounting Style . D-C73C/D-C80C Band Mounting Style. D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. D-E73A/D-E76A/D-E80A Direct Mounting Style. 2-color Indication Type .

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A80C D-J79C D-F79F D-F7NTL D-BAL D-J79 D-F7W D-J79W D-A79W D-F7WV D-F7V D-F7BAVL D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL

VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

VZS

from D side as the 1st one.

ASD

17 13.2 48.7 25.6 20.3 93 5/16" NPT3/8 ASD530F-N03-09S 18.5 15.2 51.3 28.2 41.9 46.5 35.3 41.5 14 46.9 40.3 19 23 19.8 3/8" 102 ASD530F-N03-11S 54.1 23.1 21 18.5 32.6 NPT1/2 57.6 42.1 50.1 18.6 3/8" 180 49.6 23.8 64.3 ASD630F-N04-11S 57.3 28.6 26.5 25.9 64.8 Reference dimensions of M5 X 0.8, R(PT) thread after being screwed in. 4.1-16 Series ASD Construction ASD230F ASD330F/430F ASD530F/

Body Ported Type Vacuum Ejector ZH Series

11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch One-touch One-touch 10 03 12 One-touch Screw-in One-touch 03 03 03 Screw-in Screw-in Screw-in ZH18DA11 13 13 One-touch One-touch One-touch 11 N03 13 One-touch Screw-in One-touch N03 N03 N03 Screw-in Screw-in Screw-in ZH20DA10 12 12 One-touch One-touch One-touch 10 04 12 One-touch

10

D-G

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.