Size: 3 (3-port Valve), P Side Port Size: 04F (Ø4), A Side Port Size: 04F (Ø4), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue, Bracket: L (L Bracket)

T

-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g A B C D E M Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 4 3 2 1 Component Parts E No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated Material Brass Brass NBR D C POM, Stainless steel M Applicable tubing b Applicable tube a B A Reducer:

Miniature Tubing & Miniature Fittings

-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g B C D E M A Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 Parts list 4 3 2 1 E Material Brass Brass NBR No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated D C POM, Stainless steel M Applicable tubing b Applicable tube a B A Reducer: M-32R

This is a legacy product, and replaced byVHK3A-04F-04F VHK2 FINGER VALVE. VALVE, FINGER. VALVE. VHK2 BUILT IN FITTING

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Rotary Gripper Series MRHQ

P407090-1 P406090-3D MRHQ10D Switch holder B P406090-3S MRHQ10S P407060-1 P406090-3C MRHQ10C Switch case P406060-3D MRHQ16D P406060-3S MRHQ16S P406060-3C MRHQ16C P407080-3D MRHQ20D P407080-3S MRHQ20S Switch holder A P407080-3C MRHQ20C P408080-3D MRHQ25D Two of each part indicated at the left are included in a unit. Switches are not included with a unit.

Series SV

Pressure gauge or pressure transducer Temparature Differential pressure gauge or differential pressure transducer gauge g d1 Pressure control d33d1 equipment Flow control 3 valve d2 Air Filter Shut-off Flow meter 10d3 10d1 0d2 3d 3d 3 1 3d 3d 3 2 supply valve Thermometric pipe Test equipment Upstream pressure Downstream pressure measuring tube measuring tube Figure 2 Test circuit of ISO6358

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Take proper measures to prevent dust or foreign matter from accumulating in this area. (1) 3e 3e (4) (7) 3e (5) (6) (3e) (3d) (3d) (3c) How to Calculate the Flow Rate For obtaining the flow rate, refer to front matter. (3) 3e (9) (3a) 3d (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) Connector for DIN Terminal Description DIN connector Part no. GDM2C 1454 A

VT325

Take proper measures to prevent dust or foreign matter from accumulating in this area. (6) (3e) VQZ (3d) (3d) (3c) VZ (3) (9) (3a) VS (3e) (8) Electrical Connection VFN (9) For wiring to DIN terminal, connect the positive (+) polar side with connector terminal no. 1 and the negative () side with connector terminal no. 2 when the rated voltage is DC type. (3e) Magnifying figure (2a) Self-up

Table of Contents

VZS VFS VS4 VQ7 EVS (1) VFN (4) (7) (5) (6) (3e) (3d) (3d) (3c) (3) (9) (3a) (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) DlN Terminal (Connection) Solenoid is wired with male thread terminals of DIN connector as follows. Connect with corresponding terminals of the connector.

VP4

VZS VFS VS4 VQ7 EVS (1) VFN (4) (7) (5) (6) (3e) (3d) (3d) (3c) (3) (9) (3a) (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) DlN Terminal (Connection) Solenoid is wired with male thread terminals of DIN connector as follows. Connect with corresponding terminals of the connector.

LEC-OM02904

EEP-ROM 12 10 4. 3D No.PD16PD17 8 11 8 (2) 45 1. 55 0 55 2. ( 2.1) 3. 4. 5. 46 1. 40 0 40 2. 1. 2. 3. 3. 47 1. (2.6) 2. 3. 8 12 8 (2) 50 1 1. 1. 2. 3. 4. 5. 1 2. 2(51) 1. 2. 3. 1 3. 1. 12 2. 3. 4. 4. OFF 8 13 8 (2) 51 2 1. 2. 1. 2. 3. 4. 3. 1. 2. 3. 4. UVW UVW 5.

Pilot: R (External Pilot), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT)

Pilot: R (External Pilot), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 04 (1/2)

Pilot: R (External Pilot), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 04 (1/2), Thread: N (NPT)

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: -, Option: -, CE Compliant: -

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1/2, Thread: -, Passage: -, Option: -, CE Compliant: -

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: NPT, Port Size: 1/2, Pressure Rating(MPa): -0.1 to 0.9,

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 04 (1/2), Thread: F (G), Passage: External Pilot (N.O/N.C), Option: Standard, CE Compliant: Q (CE Compliant)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Port Size: 04 (1/2), Thread: F (G), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty)