OMU0023

INP = 1 indicates that the target location has been reached. 12 Repeat steps 9-10 After settling time, the operation of step data No.20 is 13 completed. 14 01 10 9103 0002 04 0 2710 01 10 9103 0002 Step Data No. 20 target position changed to 10 mm.

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fl {rrrn 1m) o o t: 0 16" :Il o Co 10{) 25g004 33 IY-12 5 32:::5; 79.5 69.5 04 x40 1-12A 125 54 46 M30 x 1.5 27 125 4 8 25:t m 28 ~g[84 39 IY-14 5 1-14A 48 M30x1.S 30 140 .78.5 4 140 8 54 105 36 ::8: 1 8M ~4:x4Q 28 :Z~L 32 _ g' 39 IY-16 5 M36x1.5 94.5 94.5 04 x40 1-16A 160 8 60 55 110 40 :3:1 34 160 4 32 :::li1: ~ Spilt pin IS Included -

HEC-OM-S008

31 32 35 30 30 03 32 3C 0D 06 32 OD Set at 25.0 deg.C 32 Reading internal sensor 2 01 32 05 32 36 39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Reading offset 2 01 32 05 36 36 3D

Auto Switch Guide

Manufacturer Connector size Number of pins Applicable series example M8-3D 3 Corrence Corporation M8 M8-4D XS3 OMROM Corporation VA-4D Corrence Corporation XS2 OMROM Corporation 4 M12 PA5-4I Yamatake-Honeywell Co., Ltd. HR24 Hirose Electric Co., Ltd.

Table of Contents

MRHQ10 P407090-1 MRHQ10D P407090-3D Switch holder B MRHQ16 MRHQ10S P407090-3S MRHQ20 P407060-1 MRHQ10C P407090-3C Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S MRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D Each unit includes two of each of the parts indicated left. Switches are not included with a unit.

MRHQ

MRHQ10 P407090-1 MRHQ10D P407090-3D Switch holder B MRHQ16 MRHQ10S P407090-3S MRHQ20 P407060-1 MRHQ10C P407090-3C Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S MRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D Each unit includes two of each of the parts indicated left. Switches are not included with a unit.

Rotary Gripper Series MRHQ

P407090-1 P406090-3D MRHQ10D Switch holder B P406090-3S MRHQ10S P407060-1 P406090-3C MRHQ10C Switch case P406060-3D MRHQ16D P406060-3S MRHQ16S P406060-3C MRHQ16C P407080-3D MRHQ20D P407080-3S MRHQ20S Switch holder A P407080-3C MRHQ20C P408080-3D MRHQ25D Two of each part indicated at the left are included in a unit. Switches are not included with a unit.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Take proper measures to prevent dust or foreign matter from accumulating in this area. (1) 3e 3e (4) (7) 3e (5) (6) (3e) (3d) (3d) (3c) How to Calculate the Flow Rate For obtaining the flow rate, refer to front matter. (3) 3e (9) (3a) 3d (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) Connector for DIN Terminal Description DIN connector Part no. GDM2C 1454 A

VT325

Take proper measures to prevent dust or foreign matter from accumulating in this area. (6) (3e) VQZ (3d) (3d) (3c) VZ (3) (9) (3a) VS (3e) (8) Electrical Connection VFN (9) For wiring to DIN terminal, connect the positive (+) polar side with connector terminal no. 1 and the negative () side with connector terminal no. 2 when the rated voltage is DC type. (3e) Magnifying figure (2a) Self-up

Pilot: R (External Pilot), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT)

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: -, Option: -, CE Compliant: -

New

voltage suppressor) 24 VAC 12 VDC 12 VDC 24 VDC Electrical option Other option Faston terminal 100 VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 2G 2H 2V 2J 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 2K 2L 100 VAC 110 VAC 200 VAC 230 VAC 2M 2N 2P 2Q 2R 2S Conduit terminal (With surge voltage suppressor) 48 VAC 220 VAC 240 VAC 2W 24 VAC 12 VDC 24 VDC 2T 3A 3B 3C 3D

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;git) (3d;git) (3dlgit) (3digit) Fluid Air,noncorrosive gas +3% F.

VT317

Exploded view (1) (4) (7) (5) (6) (3d)(3b) (3c) (3) (9) (3a) (3e) i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) Comparison between the Product Model No. and the Coil Part No. Product model no.

Pilot: R (External Pilot), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: Standard, CE Compliant: Q (CE Compliant)

Pilot: R (External Pilot), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty)

Pilot: R (External Pilot), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty)

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Standard, CE Compliant: CE Compliant

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1, Thread: NPT, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: -