OMU0023 (1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication
Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.
Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.
(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4
Inc" Air PiSot tlperated Series HV$A ,3f .,'5.
80A Steel tube 80A Steel tube Piping A Piping A 30 Series VXF2/VXFA2 RoHS Controller Dedicated For Operation/Series VXFC How to Order Controller D VXFC 06 Voltage Number of output points 06 10 D D-6 A 24 to 48 VDC 6 output points 12 VDC 10 output points 85 to 220 VAC Specifications 06 10 VXFC D 06 10 VXFC A 06 10 VXFC D-6 85 to 220 VAC 24 to 48 VDC Model Input voltage 12 VDC Output voltage
Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE
Caution -4- Specifications Model S F E 11 Port size Male thread type Plug-in type One-touch fitting type Max. flow capacity Symbol Port size Symbol Port size Symbol Applicable L/min (ANR) tube O.D. 11 M50.8 3 3A 4 3F 4 30 42 R1/8 4B 6 4G 6 65 52 R1/8 5C 8 5H 8 130 53 R1/4 130 73 R1/4 7D 10 7J 10 200 Accessory (Bracket) S F E B R 3 Symbol Applicable model 3 SFE3 4 SFE4 5 SFE5 6 SFE7
Max. ow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch tting type Specications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum ow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating Note
Function: 3 Position Closed Center, Model: Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: Plug-in, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 1, Thread: -, CE-Compliant: -
Function: 3 Position Closed Center, Model: Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: Plug-in, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 1, Thread: -, CE-Compliant: -
Function: 3 (3 Position Closed Center), Model: 0 (Plug-in), Body Option: 0 (Standard), Voltage: 3 (110 to 120 VAC, 50/60 Hz), Lead Wire: F (Plug-in), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Port Size: 10 (1)
Function: 3 (3 Position Closed Center), Model: 0 (Plug-in), Body Option: 0 (Standard), Voltage: 5 (24 VDC), Lead Wire: F (Plug-in), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Port Size: 10 (1)
This is a legacy product, and replaced byVFR2200-3F
This is a legacy product, and replaced byVFS2100-3F, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, 2D, VFS2000, 0.35825 lb
This is a legacy product, and replaced byVFS2100-3F-01T, VALVE, SOL/PILOT, 110 *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, ND, VFS2000 BASE MT 1/8, 0.748 lb
This is a legacy product, and replaced byVFS2100-3F-02T
This is a legacy product, and replaced byVFS2200-3F, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, 2E, VFS2000, 0.77 lb
Size/Port: 3F [One-touch Fitting Type, Applicable Tube OD: ΓΈ4, Flow: 30 L/min (ANR)]
This is a legacy product, and replaced byVFS4100-3F, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFS4000 SOL VALVE 4/5 PORT, 2D, VFS4000, 1.386 lb