1

M5 x 0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 376.

2

F F E E B C Cross spacer E D A F: Without pipe thread Model Note) E (Port size) A B C D Applicable model Y14-M5-A M5 x 0.8 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-A Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-A, AC30l-A Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-A Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-A Y54-l04-A 1/2 Caution on Mounting 1.

Compact and Lightweight

L1 L21 L3 M1 d2 M3 Q1 D22 2 x F VAC.

IR1000/2000/3000

Note 3) IR1000 uses KT-IR1000 and IR1010/1020 use KT-IR1010. 14-5-8 8 Precision Regulator Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) F.R.L.

PFxx-OMJ0005CN

L/min [F 2] 27 [ ] 3% [H_2] (OUT2) PFM7100.3 L/minPFM7250.8 L/min PFM7501.5 L/minPFM7113 L/min [F 3] [FLU] [Air] N2 28 [F 4] [rEF] [Anr] 29 [F 5] [rES] [1 . 00] 1 s 30 [F 6] [dSP] [inS] 31 [F 7] [inP] [r_r] 32 [F 8] [drE] [1E2] 100 35 [F 9] [PrS] [oFF] 36 [F10] [EEP] [oFF] OFF 38 [F11] [AFL] [ on] 39 [F12] [Eco] [oFF] 40 [F13] [Pin] [oFF] 41 [F98] [ALL] [oFF] 42 [F99]

High-precision Digital Pressure Switch

0 Display units and switch output specifications function 26 F 1 Setting of OUT1 27 F 2 Setting of OUT2 30 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 42 F14 Zero cut-off setting 43 F80 Power saving mode 44 F81 Security code 45 F90 Setting of all functions 47 F96 Number of pressurizing

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Digital Pressure Switch ( compatible)

OUT1 ON : Green OUT1 OFF: Red [F 2] Setting of OUT2 Page 37 Same setting as [F 1] OUT1.

20

VMG11-02-X35 VMG11-03-X35 VMG11-N02-X35 VMG11-N03-X35 VMG11-F02-X35 VMG11-F03-X35 Pipe part no. P5670127-100-X33 P5670127-300-X33 P5670127-600-X33 Part No.

70pvpump

N AIR EXH FLUID IN T, F, N are options.

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

ITV

L-bracket Description ITV20ll ITV30ll Flat bracket 100 P3020114 25 15 L-bracket INI-398-0-6 7 R3.5 (10) 30 2.3 40 52 (7) 36 50 50 36 7 m36 84 4-5.5 4-7 36 7 70 60 20 12 4-5.5 1.6 1.12-2 Electro-Pneumatic Regulator Series ITV2000/3000 Working Principles When the input signal rises, the air supply solenoid valve (1) turns ON, and the exhaust solenoid valve (2) turns OFF.

VM

Key selector (2 position) VM120-01-36 VM130-01-36 Panel mounting hole JIS Symbol 2 port 3 port R port (3 port only) 0.5 MPa supply 15 N F.O.F. 2-4.6 Key can be removed at the on and off positions. mounting hole 90 T.T.

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

Precision Regulator

M6 x P0.5 15.5 9 76 148 Bleed 43 EXH(3) OUT(2) SUP(1) 22 66 Rc 1/2 Exhaust port 68 66 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port 36 Female thread for bottom mounting 4 x M5 x 0.8 depth 7 Bottom bracket is not available as an option. 814 A Precision Regulator IR1000/2000/3000 Series Dimensions IR2120-02 IR3120-0 50 82 Mounting hole 36 Mounting hole 60 Bracket (Option) Bracket

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02

Digital Flow Switch (Integrated display type)

of maximums rated flow [H_2] Setting of Hysteresis (OUT2) PFM710: 0.3 L/min, PFM725: 0.8 L/min PFM750: 1.5 L/min, PFM711: 3 L/min [F 3] [FLU] Operating fluid [ A i r ] dry air, N2 Page 28 [F 4] [rEF] Reference condition [Anr] Standard condition Page 29 [F 5] [eES] Response time [1.00] 1 second Page 30 [F 6] [dSP] Display mode [inS] Instantaneous flow Page 31 [F 7] [inP] External input [r_

Digital Pressure Switch

OUT1 ON : Green OUT1 OFF: Red -30No.PS-OMU0009-D [F 2] Setting of OUT2 Page 36 Same setting as [F 1] OUT1.

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...