F

-02 M14x1 17 17 31.5 15 15 17 13.1 3/8 3/8 KQE11-36 1/8-14 25.4 25.4 35.5 14.5 23 21 7 6 38 KQE06-03 M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Proposals for Energy Saving

VM-33A Push button (Flush) VM230-02-33 VM-34AR Red VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y Selector (2 position) VM-34AB Black VM-34AG Green VM-34AY Yellow VM-36A Key selector (2 position) VM230-02-36 Red VM230-02-35R VM230-02-35B VM230-02-35G VM230-02-35Y VM230-02-40 Selector (3 position) Black Green Yellow Foot pedal Note) Actuator replacement is available except for 3 position

ZP

(26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

2-Color Display Digital Flow Switch Series PFM

piping Flow adjustment valve assembly (with pin) For 25 l/min ZS-33-25NL 6 For 50 l/min ZS-33-50NL For 100 l/min ZS-33-11NL 4 (5/32") ZS-33-C4 6 ZS-33-C6 7 One-touch fitting u 8 (5/16") ZS-33-C8 e 1/4" ZS-33-N7 t u i Rc 1/8 ZS-33-01 NPT 1/8 ZS-33-N01 G 1/8 i ZS-33-F01 8 Female thread Rc 1/4 ZS-33-02 u NPT 1/4 ZS-33-N02 G 1/4 ZS-33-F02 i y Straight piping with flow adjustment valve u Bottom

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

smcmaintenancepartslist

Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 auto drain Spacer Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03

Free Mount Cylinder

7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46 50 52 Z 51

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

Magnetically Coupled Rodless Cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

AC Servo Motor Driver (Pulse input type/Positioning type ）

NORMAL GAIN ADJUSTMENT 61 to 6-33 6.

SYJ3000/5000/7000

Applicable solenoid valves: Series SYJ314, SYJ314M, SYJ324, SYJ324M (SYJ300 3 port valve) (SYJ300 3 port valve) Plug (VJ3000-33-1) Plug (VJ3000-33-1) Seal the unused R port at the end the manifold. Seal the unused R port at the end the manifold.

One-touch Fittings

Symbol Size 33 NPT1/16 34 NPT1/8 35 NPT1/4 36 NPT3/8 37 NPT1/2 Thread connection Applicable tubing O.D.

AC Servo Motor Driver (Network card type ）

(a) Method -1 and -33 1) Dog type home position return The following figure shows the operation of Homing method -1. The operation direction of Homing method -33 is opposite to that of Homing method -1.

HEC-OM-S008

31 0D 02 31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02

0.4

Note 2) : Number of stations, 02 to 24 (VQC4000: 02 to 16) 902 Series VQC Specific Product Precautions 1 Be sure to read this before handling. Refer to Front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions.

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

0.55

Type 41/Common exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series