High-precision Digital Pressure Switch ( compatible)

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the Pressure switch. Do not perform wiring while the power is on.

High-precision Digital Pressure Switch

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. -6No.PS-OMV0009-E Wire correctly. Incorrect wiring can break the Pressure switch. Do not perform wiring while the power is on.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. *

VM

Push button (Flush) VM220-02-33 VM230-02-33 JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T.

Digital Flow Switch (Remote type sensor unit)

Description Remarks ZS-33-D Lead wire connector Length: 2 m Connector cover (silicone rubber) ZS-33-F ZS-33-J Panel mount adapter (without flow adjustment valve) ZS-33-JS Panel mount adapter (with flow adjustment valve) ZS-33-M Bracket (without flow adjustment valve) Mounting screw 2 pcs. ZS-33-MS Bracket (with flow adjustment valve) Mounting screw 3 pcs.

Digital Flow Switch (Integrated display type)

Part number Description Remarks ZS-33-D Lead wire and connector Length: 2 m Connector cover (silicone rubber) ZS-33-F ZS-33-J Panel mount adapter (without flow adjustment valve) ZS-33-JS Panel mount adapter (with flow adjustment valve) ZS-33-M Bracket (without flow adjustment valve) Mounting screw 2 pcs. ZS-33-MS Bracket (with flow adjustment valve) Mounting screw 3 pcs.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Instantaneous flow: L/mincfm N02 NPT1/4 F02 Accumulated flow: Lft3 G1/4 Note 4) Option 2 Note 4) ISO1179-1 compliant Made to Order R S Nil With bracket (For without flow adjustment valve) With bracket (For with straight type flow adjustment valve) Piping entry direction ZS-33-M ZS-33-MS With 3 selftapping screws Nil L With 2 selftapping screws Bottom Straight S No S bracket IN 1 IN Made to

PSxx-OMG0005CN

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

Booster Regulator/Air Tank

VBA10A-N02 VBA10A-T02 : when -Z VBA43A-N04 VBA43A-T04 : when -Z G27-20-01 G27-P20-01-X30 AN20-N02 VBA20A-N03 VBA20A-T03 : when -Z VBA40A-N04 VBA40A-T04 : when -Z VBA22A-N03 VBA22A-T03 : when -Z VBA42A-N04 VBA42A-T04 : when -Z VBA11A-N02 VBA11A-T02 : when -Z Model ITVH Description ITVX Pressure gauge : when Nil Pressure gauge : when -Z Note 4) G36-10-N01 G36-P10-N01-X30 AN30-N03 ANA1-N03

Booster Regulator/Air Tank

VBA10A-N02 VBA10A-T02 : when -Z VBA43A-N04 VBA43A-T04 : when -Z G27-20-01 G27-P20-01 AN200-N02 VBA20A-N03 VBA20A-T03 : when -Z VBA40A-N04 VBA40A-T04 : when -Z VBA22A-N03 VBA22A-T03 : when -Z VBA42A-N04 VBA42A-T04 : when -Z VBA11A-N02 VBA11A-T02 : when -Z Model Description Pressure gauge : when Nil Pressure gauge : when -Z Note 4) G36-10-N01 G36-P10-N01 AN300-N03 ANA1-N03 KT-VBA22A-7N KT-VBA22A

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

Instantaneous flow: L/mincfm Accumulated flow: Lft3 Port size C8 02 8 (5/16") One-touch fitting Rc1/4 NPT1/4 G1/4 Note 4) N02 F02 Option 2 Note 4) ISO1179-1 compliant Made to Order With bracket (For without flow adjustment valve) S R Nil With bracket (For with straight type flow adjustment valve) Piping entry direction ZS-33-M ZS-33-MS With 3 selftapping screws Nil L With 2 selftapping screws

Pressure Sensor for General Fluids

A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 Adapter with throttle ZS-31-X Model No.

PSxx-OMV0003CN

-2No.PS-OMV0003CN-G / *3) 1 1.5 *3)1 1 [] -3No.PS-OMV0003CN-G () () () () -4No.PS-OMV0003CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMV0003CN-G * FG (35 N () ,() *() 6 33 () 20 m DC(-)() * ( ) -6No.PS-OMV0003CN-G () CE 0~50(5 ) (FKMHNBR) * 1015 10 1% 1959 LCD * -7No.PS-OMV0003CN-G ISE70 02 L2 M 3 Y K T ISE70 0~1MPa ISE71 0~1.6MPa 02 Rc1/4 N02

PSxx-OMV0008CN

-2No.PS-OMV0008CN-E / *3) 1 1.5 3) 1 1 () [] -3No.PS-OMV0008CN-E () () () () -4No.PS-OMV0008CN-E () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) (ISE7G-T-ZS-48-A) N G -5No.PS-OMV0008CN-E Al2O3(96)C3604+FKM () O 1 /min 16MPa () * FG (35 N () ,() *() 6 33 -6No.PS-OMV0008CN-E () () 20 m DC(-)() * () () CE -5~70-5~50(5 ) (FKM) Al2O3()C3604()( ) -7No.PS-OMV0008CN-E

PSxx-OMM0002CN

2No.PS-OMM0002CN-F 1 1.5 3) 3) 1 1 () [] -3No.PS-OMM0002CN-F () () () () -4No.PS-OMM0002CN-F TSJ Swagelok (Swagelok URJ Swagelok (VCR)/Ground Ground () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 () NG -5No.PS-OMM0002CN-F SUS630SUS304 () * (14 ) FG (49 N () () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33

70pvpump

(PAP331) Besides, sidebody and port are made of molded piece, that has enabled to generate lower particulate. 1 N Diaphragm material 1 With silencer AN200-02 for Air EXH. 2 When NPT port thread is necessary, use AN200-N02. 1 PTFE Long service life Operating method Durability has been improved by adopting the denaturated PTFE for the diaphragm.

Secondary Batteries

Display Digital Flow Switch Digital Flow Switch For Water P.60 P.61 Cylinder with Lock Double Acting, Single Rod Compact Cylinder with Lock Double Acting, Single Rod CDLQ 9091P.32 90-RSDQ 90-RSH/RS1H Stopper Cylinder/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style P.33

Digital Pressure Switch

[F 0] Units selection function Page 32 Units specification Pressure range Default setting ISE20C(H) MPa "Nil" or M ZSE20C(F) kPa ISE20C(H) P psi ZSE20C(F) [F 1] Setting of OUT1 Page 33 Item Explanation Default setting Output mode Either hysteresis mode, window comparator mode, error output or output off can be selected.

V

(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-33 33 Date issued: Photo copying this page is recommended.