Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24

Compact 5-Port Solenoid Valve

Note 02 2 stations Double wiring1 Symbol Stations Note 02 2 stations Double wiring1 Symbol Type Page F D-sub connector (25 pins) Symbol Type 1 Upward 2 Downward 15 15 stations 02 2 stations Specified layout2 11 11 stations 02 2 stations Specified layout2 IP40 FW IP67 FC IP20 P Flat ribbon cable 26 pins PG 20 pins PH 10 pins PC Flat ribbon cable Compact type (Up to 30 solenoids available)

Mechanical Valves Series NVM, NVFM, NVZNI

in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM121-N01-02 131-N01-02 NVMl21-N01-01 131-N01-01 f,-rgl1gtlr ?.

IIIIIII

in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM NVM121-N01-02 131-N01-02 NVMl21-N01-01 131-N01-01 f,-rgl1gtlr ?.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 25.2 17.5 34.5 36 21 39.9 35.3 18.3 34.4 34.9 44.5 10 18.5 1/4" 13.2 29.4 17 34 18.5 AS321FG-02-06 AS221FG-N02-09 18.2 27.2 36.4 60 17 27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3

Flow Control Equipment

AS2301F-02, AS2311F-02 AS2201F-02, AS2211F-02 AS3201F, AS3211F AS4301F, AS4311F AS4201F, AS4211F AS3301F, AS3311F Supply pressure: 0.5MPa Supply pressure: 0.5MPa Supply pressure: 0.5MPa 16 25 6 400 1000 14 10, 12 1500 12 80, 10 20 12 Effective area (mm2) Effective area (mm2) 08 06 Effective area (mm2) 300 10 Flow (l/min(ANR)) Flow (l/min(ANR)) Flow (l/min(ANR)) 06 10 1000 4 15 500 8 04 200

SQ1000/2000

Dept. code Copy this page for use as needed. 122 Manifold Specification Sheet Series SQ1000/Plug Lead Unit q How to order manifolds F P J C SS5Q 1 4 08 D0 D (00T) Series SQ1000 For P, R port in inch size Plug lead Kit type q w e q Stations 01 w Electrical entry/Cable length e Option Note 2) None DIN rail length specified Note 2) Nil 02 to 24 B 1 station Kit type Entry direction Standard

2/3 Port Valve

H J F H J F H J K F H J K VX22 05 6 02 03 02 03 VX23 05 6 VX2260-04 VX2360-04 23 35 25.5 40 23 35 25.5 40 83 91 89 97 62 69 65 72 25.5 28 25.5 28 83 91 89 97 54 62 57 65 41 44 41 44 83 91 89 97 54 62 57 65 60 62 60 62 48 50 48 50 100 108 106 114 54 62 57 65 95 97 95 97 62 64 62 64 1 4 3 8 22 11 27 28 14.5 30 1 2 4.1-9 Direct Operated 2 Port Solenoid Valve/Manifold Series VVX21/22/23 For Air

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

, AS2211FG-02 AS2301FG-02, AS2311FG-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

possible) 18 08 20 08 8 stations 8 stations 18 stations 20 stations PG: Flat ribbon cable 20 pins PG: Flat ribbon cable 20 pins 02 02 2 stations 2 stations Double wiring Note 1) Double wiring Note 1) 09 02 09 02 9 stations 2 stations 9 stations 2 stations Specified layout Note 2) Specified layout Note 2) (Up to 18 solenoids possible) (Up to 18 solenoids possible) 18 18 18 stations 18 stations

Hydraulic

1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 123 Hydraulic Cylinders: Technical Data 2 Series CHA Stroke range limit charts: Bore sizes 40, 50, 63, 80 Symbol Mounting orientation Mounting orientation Mounting orientation Mounting orientation Symbol Symbol Symbol F F F F F F F F F F F F Bore size 40 Bore size 50 3000 2 4 8 9 3 7 2 4 3 7 5 2000 8 9 1 5 1 6

Series SV

AS2200-01 200 100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different

Series VQ Base Mounted Metal Seal/Rubber Seal

Single VQ0 (2 wire) AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive COM Negative COM Positive COM Double(latching) (3 wire) Negative COM Note) Lead wire length: 300mm The parts numbers above are applicable to 2 to 10 stations. 11 to 16 stations: AXT661A(N)-F-425. 13 14 3. Max. number of stations The max. number of stations depends upon the number of solenoids.

•

'-02 ~2 06 6 (Application: Refer to ListO) i 08 ~8 U Flat type Material a With buffer 04 4 Pad type.

VQ4000

Nil N T F Rc NPT NPTF G Combination of manifold options shown below and external pilot specification is not possible.

Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

SV

Specified layout (Up to 8 solenoids possible.) 18 08 20 08 18 stations 8 stations 20 stations 8 stations PG: Flat ribbon cable 20 pins PG: Flat ribbon cable 20 pins 02 02 2 stations 2 stations (1) (1) Double wiring specifications Double wiring specifications 09 02 09 02 9 stations 9 stations 2 stations 2 stations (2) (2) Specified layout (Up to 18 solenoids possible.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Manifold series Stations Rc Nil 02 3 10-SY3000 5 10-SY5000 2 stations G F ... ... N NPT 20 7 10-SY7000 20 stations NPTF T Includes the number of blanking plate assemblies.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03