4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NVVsFR4 _ 01C ---r--Series NVFB40O0 Manilold valve Plug.in type }Wlth mslti connector Symbol Mounting direction of connector Plug-in Type: With D-Sub Connector aWide range ol interchangeability (MlL Spec DIN type connector terminal 25 pin.) aQuick wiring perrnits ease ot installation NVVsFR4 01F 63D l*-n",'.

-fl Seies

NVVsFR4 _ 01C ---r--Series NVFB40O0 Manilold valve Plug.in type }Wlth mslti connector Symbol Mounting direction of connector Plug-in Type: With D-Sub Connector aWide range ol interchangeability (MlL Spec DIN type connector terminal 25 pin.) aQuick wiring perrnits ease ot installation NVVsFR4 01F 63D l*-n",'.

99

High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more FGD FGE HEPO2element Filtration accuracy: 2, 4, 6 or 13 m (Filtration efficiency 99%) FGG FGA FGC Membrane element Filtration accuracy: 0.2 or 0.4 m (Filtration efficiency 99.9%) FGF FGH FGH FQ1 FN EB ES 61 High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more Prevents particle generation

EXxx-OMZ0016

Gr ee Re Alternate Flashing In pairing mode. d n Fn is being used. Change the mode according to the application.

XL-OMV0002

J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154

type (with D sub-connector): ⑦ Type 01F with D sub-connector
Note) For the electrical connection of the DIN terminal type, refer to ①, ②, and ③.

type (with D sub-connector) ④ Type 01F with D sub-connector
Note) For the electrical connection of the DIN terminal type, refer to ①.

High Vacuum L Type Valve

D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3 4 2 XLA

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series: 2 (VQZ200), Stations: 4 Stations, Port Size: 01F (G1/8)

Micro Mechanical Valve Series VM1000

VM830-01-00 180 280 300 276 VM830-01-13 VM830-01-14 VM-13F VM-14F VM830-01-01 VM-01F Actuator replacement is available. How to Order 01 01 3 0 VM8 Actuator type Port size Basic 00 01 Rc 1 8 Roller lever 01 NPT 1 8 G 1 8 N01 F01 Adjustable roller lever 13 Adjustable rod lever 14 Number of ports 3 3 port Application Movement is changeable. Roller can be mounted to inside of lever.

VS 8-2/VS 8-4

For Rc 1/8" AXT954-01 For Rc 1/4" AXT954-02 For Rc 3/8" AXT954-03 For Rc 1/2" AXT954-04 For NPTF 1/8" AXT954-01T For NPTF 1/4" AXT954-02T For NPTF 3/8" AXT954-03T For NPTF 1/2" AXT954-04T For G 1/8" AXT954-01F#1 For G 1/4" AXT954-02F#1 For G 3/8" AXT954-03F#1 For G 1/2" AXT954-04F#1 This is used to plug the cylinder ports when using as a 3-port valve, etc. 26 Series VS 8-2/VS 8-4 S R S R

This is a legacy product, and replaced byVT307-BDO1-01F-Q, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .30864 lb

This is a legacy product, and replaced byVT307-5DO1-01F-Q, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .36076 lb

This is a legacy product, and replaced byVT307-5DZ1-01F-Q, VT3 BASE MT 1/8, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, 0.42793 lb

V100

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.