ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

V

02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 N Nitrile Rubber (Standard) S Silicon Rubber U Urethane F Fluorine Rubber GN Anti-static Nitrile Rubber GS Anti-static Silicon Rubber ZP10C C10 10 12 41 13 7.7 12 1.7 ZP13C C13 13 15 4 13 7.7 12 1.8 ZP16C C16 16 18 4 13 8.2 12.5 1.2 ZP20C C20 20 23 4 15 9.5 14 1.7 ZP25C C25 25 28 4 15 9.5 14 1.8 P A D T Y P E ZP32C C32 32

Short Stroke Electric Actuator Series LX

20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 Refer

Booster Regulator/Air Tank

04 ANA1-04 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 AN40-04 ANA1-04 SRF ITV Note 1) In the case of options GN, two pressure gauges and one silencer are included in the same container as accessories.

Booster Regulator/Air Tank

ANA1-03 G27-20-01 AN200-02 ANA1-02 KT-VBA10A-18 AN400-04 ANA1-04 Note 1) In the case of options GN, two pressure gauges and one silencer are included in the same container as accessories.

Multistage Ejector Series ZL112.212

20 50 25 ZR 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140

Multistage Ejector Series ZL

G E EB EE For EE (ZSE4E) With digital vacuum pressure switch Lead wire length 0.6 (3.0)m Lead wire length 0.6 (3.0)m Lead wire length 0.6 (3.0)m 27 26 67 NPN output Analog output PNP output Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

CC-Link-E

Pi n assi gn of bus adapt or si de connect or I t em Pi n assi gn I t em Socket assi gn SLD SLD 4 4 3 D B D B CCLi nk I N CCLi nk O U T 3 2 5 D G D G D A 1 2 D A N . C.

100

10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate Air consumption

Size: 9 (Body Ported), Operation: 3 (Manual Handle Style), Sealant: Nitrile Rubber, Port Size: 20 (2), Thread: Rc(PT), Option: BG (Bracket+Gauge)

Size: 9 (Body Ported), Operation: 3 (Manual Handle Style), Sealant: Nitrile Rubber, Port Size: 20 (2), Thread: Rc(PT), Option: G (Pressure Gauge)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 2, Control Side Connection Type: Rc, Control Side, Connection Diameter: 2, Pressure

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 2, Control Side Connection Type: Rc, Control Side, Connection Diameter: 2, Pressure

1

COM. () 20 COM.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Free Mount Cylinder for Vacuum Series ZCUK

ZM ZMA ZQ D-M9V D-M9WV D-A9V ZH ZU 20 (22) 20 (22) ZL ZY ZF ZP 5.5 (5) ( ): Denotes the values of D-A9V.

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Booster Regulator Series VBA1110 to 4200 1

VBAT5-Y-2 VBAT10-Y-2 VBAT20S'-Y-2 Tank capacity 5 10 20 38 Symbol 05 10 20 38 Symbol V Accessory Valve for drain Accessory Anchor bolt, Hexagon head bolt, Bushing for connection, Plug for drain port Note) Accessory Standard Valve for drain VBAT-V (Material C3604) Option Note) Anchor bolt is not included in VBAT05, VBAT05S, VBAT10 and VBAT10S.