ZZ + Stroke 20 to 32 Boss-cut style ZZ + Stroke (mm) FY 36 FT 4 4 4 5 GA FX 60 60 60 66 B2 26 32 32 41 GD 55 F 13 13 13 16 BC 38 45 45 52 B 34 40 40 52 GK 3.5 4 4 4 FD 7 7 7 7 B1 13 17 17 22 GB 8 8 8 11 C1 30 37 37 47.3 A 18 22 22 24 GC 8 9 9 8 BQ D 8 10 12 14 AL 15.5 19.5 19.5 21 BP BN 80 90 90 BZ 57.5 69 69 76 FZ 75 75 75 82 E Bore (mm) Stroke range 20 25 32 40 0 0.033 0 0.033 0 0.033
Foot: CS2YL H K A AL F S + Stroke With rod boot Width across flats KA Port REA V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve MM REB REC D B E e LH LY CY CY 4 x LD CX f l LX Y N X LS + Stroke N X Y LT MQ B C ZZ1 + l + Stroke h + l ZZ + Stroke RHC (mm) RZQ Bore size (mm) Stroke range (mm) B C A AL B D E F G J V W K KA LD LH LS 125 140 160 50 47 143 143 115 32 71 43 15 M14 x 1.5 15 17 15 27
ZSE10F: 5.0 kPa -22No.PS-OMM0005-J [F 2] Setting of OUT2 Page 28 Same setting as [F 1] OUT1.
119] 134 [143] (For FZ) SQ 21 [25] 23 [25] 46 [55] VFS 5 1 3 VFR 31 [39] 31 [39] 5 x 3/8, 1/2, 3/4 56 [60] (Piping port) VQ7 [ ] = 3/4 2 position double: VFR520 -F(Z) 0 1 3 position closed center: VFR530 -F(Z) 3 position exhaust center: VFR540 -F(Z) 3 position pressure center: VFR550 -F(Z) 0 1 0 1 0 1 1/8 External pilot port 3 x 2.3 2 x 7 [For 3/4] (Electrical entry) (Mounting hole) 1/8 (
12.3 Suction filter 38.5 16.5 A 15 4 Vacuum (V) port 78.8 V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 4 Refer to page 38 for dimensions with a mounting bracket.
(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?
(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?
( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?
VCHm Dimensions: Bracket VDW VQ A J LVM 4 x G C 1.5 VCA VCB VCL B D L E VCS VCW 4 x H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) B C D E F G H J L A Bracket part no.
P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.
Class Stainless steel, NBR O-ring t y u t y u FKM, EPDM, PTFE FKM, EPDM, PTFE NBR O-ring NBR Return spring Stainless steel Return spring Stainless steel Body Stainless steel Brass Stainless steel Body Brass Dimensions: Bracket A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Port size Bracket part no.
: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM-02 Model 6, 8 8, 10 6 Metric size 4, 6 J Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size DAir flow (l/min (ANR)) 7 12 38 Controlled flow -X Effective area (mm2) 0.1 0.6 0.2 Air flow (l/min (ANR)) 175 350 75 295 Free flow 20Effective area (mm2) 1.1 5.3 2.7 4.5 Note) Supply pressure
4 PPS, NBR Armature assembly Push rod assembly 3 4 5 6 7 NBR O-ring 5 6 7 FKM, EPDM, PTFE O-ring FKM, EPDM, PTFE NBR Stainless steel Return spring Return spring Stainless steel Brass Body Stainless steel Body Stainless steel Brass Bracket Dimensions A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H J L Bracket part no.
4 PPS, NBR Armature assembly Push rod assembly 3 4 5 6 7 NBR O-ring 5 6 7 FKM, EPDM, PTFE O-ring FKM, EPDM, PTFE NBR Stainless steel Return spring Return spring Stainless steel Brass Body Stainless steel Body Stainless steel Brass Bracket Dimensions A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H J L Bracket part no.
4 PPS, NBR Armature assembly Push rod assembly 3 4 VX 5 6 7 NBR O-ring 5 6 7 FKM, EPDM, PTFE O-ring FKM, EPDM, PTFE NBR VN Stainless steel Return spring Return spring Stainless steel Brass Body Stainless steel Body Stainless steel Brass VQ VDW Bracket Dimensions VC A J LV 4-G C 1.5 PA B D E L 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H J L Bracket part no.
5 5 2 2 4 4 5 5 2 2 4 4 I I J J IN16 IN16 IN20 IN20 1 3 3 14 14 14 14 IN19 IN19 IN17 IN17 IN18 IN18 IN23 IN23 IN21 IN21 14 14 15 15 6 7 7 IN22 IN22 14 14 D A A 5 EX230-SDN1 EX230-SDN1 SETTINGS SETTINGS SMC SMC 1 K K L L 1 E 0 TM TM F F 3 M 2 2 1 1 5 5 3 3 1.24V 1.24V 2.NC 2.NC 3.NC 3.NC 4 4 4.0V 4.0V 3 3 1 1 4 2 2 12 12 12 12 MINI CONNECTOR MINI CONNECTOR MINI CONNECTOR MINI CONNECTOR VLV
exhaust center One-touch fitting for 4 C4 5 3 position pressure center One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 SI Unit Part No.
(mm) A B C D E F G H J L Port size Bracket part no.
Optional Standard 1 2 3 4 5 6 7 Clip Stainless steel Tube assembly Stainless steel, Cu (for class H coil) Stainless steel Coil assembly Class H Class B Armature assembly Stainless steel, FKM O-ring FKM Return spring Stainless steel Body Stainless steel C37 Dimensions (mm) /Bracket 1in = 25.4mm A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H
Optional Standard 1 2 3 4 5 6 7 Clip Stainless steel Tube assembly Stainless steel, Cu (for class H coil) Stainless steel Coil assembly Class H Class B Armature assembly Stainless steel, FKM O-ring FKM Return spring Stainless steel Body Stainless steel C37 Dimensions (mm) /Bracket 1in = 25.4mm A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H