Series VCL

OUT 1 Thread type Rc NPT NPTF G Nil N T F IN Voltage 1 2 3 4 5 6 36 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC 230VAC Port size Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Symbol 01 02 03 04 06 Class B with AC has a built-in rectifying circuit. Class H is AC only. Without rectifying circuit. Contact SMC regarding other voltages.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

OUT 1 Thread type Rc NPT NPTF G Nil N T F IN Voltage 1 2 3 4 5 6 36 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC 230VAC Port size Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Symbol 01 02 03 04 06 Class 4 Class B with AC has a built-in rectifying circuit. Class H is AC only. Without rectifying circuit. Contact P/A regarding other voltages.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 41 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--41-05 -C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 one-touch fitting 6 one-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" one-touch fitting

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component parts Replacement parts Note Zinc die-casted No.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

VCL

OUT(2) 1 Thread type Rc NPT G Nil N F IN(1) Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Port size Class 3 Port size 1/8 (6A) 1/4 (8A) Class 2 Class 4 Symbol 01 02 03 04 06 3/8 (10A) 1/2 (15A) Class B in AC has a rectifying circuit built-in. Class H is AC only. No rectifying circuit.

IR1000/2000/3000

Note 4) Digital pressure switch is enclosed in a single container. AL 14-5-21

Precision Regulator

Note 2) Use mini-flick type. 813-1 A IR1000/2000/3000 Series Dimensions IR100-01 IR200-02 10.5 28 42 50 Mounting hole Mounting hole 12.5 25 2 36 30 2 Bracket (Option) Panel mounting hole Bracket (Option) Panel mounting hole SMC Max.4 Max.4 Pressure gauge (Option) Pressure gauge (Option) Panel When mounting on a panel, refer to page 822 in Specific Product Precautions.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Vacuum Unit

12.3 Suction filter 38.5 16.5 A 15 4 Vacuum (V) port 78.8 V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 4 Refer to page 38 for dimensions with a mounting bracket.

VT317

VV317-02-051-02-A Valve stations A port size (Base piping) 1/4 Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs. PVT317-53-1A 1 pc.

ZQ-OM01401

) 4 3.2 () 5 4 () 24 - No.ZQ-OM01401-B ZS-39-5G ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

3M/SMseries

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12

IR1000/2000/3000

2 Series IR3000 Connection Rc(PT) 1/8 01 Connection Rc(PT) 1/4 02 Connection Rc(PT) 3/8 03 Connection Rc(PT) 1/2 04 Bracket B Accessories Pressure gauge G Pressure gauge reverse mounted R Connection NPT1/8 N01 Series IR2000 Connection NPT1/4 N02 Connection NPT3/8 N03 Connection NPT1/2 N04 Connection G(PF) 1/8 F01 Connection G(PF) 1/4 F02 Connection G(PF) 3/8 F03 Connection G

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

lVFl 10

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t